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Kaiwhakaputa Mutunga Whakawhiti Angiangi
Ka whakaratohia e te Semixlab Alumina Ceramic Wafer Transfer End Effector te pumau miihini, te ma, me te ātete ki te waikura mō te aunoatanga o ngā wafer semiconductor hou. Mā te whakakotahi i te tukatuka alumina parakore teitei, te miihini tika, me te hiranga o te whakaoti mata, ka tautoko a Semixlab i ngā hanganga wafer o te ao ki te whakatutuki i te hua teitei ake, te iti ake o ngā reiti hapa, me te roa ake o te wā mahi taputapu. Kei te tumanako atu ahau ki tō kōrero i ngā wā katoa.
Whakaahuatanga
Ⅰ. Ngā Painga Rauemi me ngā Painga Ā-tinana
He mea hanga te Semixlab Wafer Transfer End Effector mai i te uku Alumina (Al₂O₃) tino parakore, he mea hanga hei whakarato i te pumau miihini me te pumau wera tino pai i roto i ngā taiao tukatuka semiconductor matatau.
Kua hangaia tēnei wāhanga tino tika mō te horoi nui, te pakari o te hanganga, me te ātete roa ki te parāuma me ngā hau waikura—koia te mea pai mō te whakahaere i ngā wafer i roto i ngā taputapu CVD, PECVD, te whakairo, te waikura, me te epitaxy.
Painga Rawa Matua:
● Te Parakore ≥ 99.5%: Kāore he poke o te katote whakarewa, e pupuri ana i te āhua o te mata o te papa.
● Te Mārō Teitei (Mohs ~9): He ātete tino pai ki te pao mō te pao o te wafer.
● Te Pūmautanga Wera tae atu ki te 1000°C: He pai mō ngā mahi whakawhiti anga wera.
● Ārai Hiko Tino Pai: Mā te ātete rōrahi >10¹⁴ Ω·cm ka ārai i te kino ESD.
● Whakaotinga Mata Tino Maeneene (Ra ≤ 0.02 μm): Ka whakaiti i ngā karawarawa o te papa me te whakaputanga matūriki.
● Ātete Kaha ki ngā Matū me ngā Plasma: Ka ātete ki te pānga ki te HF, Cl₂, CF₄, me te O₂ plasma.
Ki te whakatauritea ki ngā momo kē atu e whakamahia ana mō te quartz, te waro rānei, he tino pakari, he parakore, he roa hoki te ora o ngā uku Alumina i raro i ngā āhuatanga huringa wera me te korehau.
II. Ngā Wero Tukanga Noa me ngā Otinga Hangarau
| wero | Tukua | Ngā Otinga Hangarau Semixlab |
| Whakatupu Matūriki | te taratara o te mata, ngā pakaru iti rānei nā te whakamahinga auau | Te whakakanapa whakaata (Ra ≤ 0.02 μm) me te whakakoi tika; te horoi ultrasonic auau |
| Te Paheke o te Wafer | Te waku mata kore taurite, te tohatoha korehau ngoikore rānei | Te āhua o te awaawa kua arotauhia me te paninga kakano-iti hei whakapai ake i te pupuri i te wafer |
| Te Whakatipu Utu Pūmau | Te korenga o te tohatoha utu i raro i te korehau | Te whakamahinga o te hiato Al₂O₃-TiO₂ haurua-arahi hei whakapai ake i te tukunga utu |
| Te Horohanga Plasma, te Whakaekenga Matū rānei | Te pānga tonu ki ngā hau waikura | Te whakamahinga o te Al₂O₃ kua whakakikoruatia ki te matotoru (>99.8%) me ngā paninga SiC, Y₂O₃ rānei hei tiaki i te mata. |
| Te Pakaru o te Ru Wera | Ngā whakawhiti tere o te pāmahana i waenga i ngā rohe tukatuka | He hoahoa alumina pai-kikokore me te CTE iti me ngā tikanga whakamahana-mua hei whakaiti i te ahotea |
tono
Ngā Tūranga me ngā Whakamahinga i roto i ngā Tukanga Ārahi-Haumaru
Ko te Semixlab Wafer Transfer End Effector te hononga matua i waenga i ngā pūnaha whakahaere karetao me ngā wafer silicon ngāwari, kia tika ai, kia mau ai, kia kore ai e poke te kawe i waenga i ngā rūma tukatuka.
Nga Tauari Taupānga Matua:
1. Te Utaina me te Tango i te Wafer
Ina whakamahia i roto i te LPCVD, PECVD, me ngā oumu whakahāngai, ka pupuri ngā pūwhakaputa pito alumina i te tūnga o te wafer me te whakakore i te wiri moroiti i te wā e whakaurua ana, e tangohia ana hoki i ngā rūma tukatuka.
2. Ngā Pūnaha Whakahaere Robotic
Kua whakauruhia ki roto i ngā kōwae whakawhiti wafer aunoa, ka taea e ēnei pānga te whakarato i te tika o te tūnga ka taea te whakahoki, he mea nui mō ngā hanga wafer tino tika me te tere whakaputa.
3. Te Whakahaere i te Tukanga Pāmahana-Tiketike
Nā te tino pumau o te wera, ka tautoko te kaiwhakaputa alumina i te whakawhiti anga whakarewa i muri i te whakatakotoranga i muri i ngā tukanga pāmahana teitei pēnei i te tipu epitaxial me te whakamahana.
4. Whakaurunga o te Rūma Plasma me te Etch
He ātete ki ngā hau tauhohe me te horo o te parāuma, ka whakarite te kaiwhakaputa alumina i te mahi roa i roto i ngā mīhini whakairo parāuma me ngā pūnaha horoi.
5. Ngā Taiao Whakahaere-Paruparu
Nā tōna mata tino ma me te kore e urungi o ngā matū, he mea pai mō ngā pūnga tukanga nui (<10 nm), ina pāngia te hua o te taputapu e te iti noa o te parahanga.
Painga whakataetae
Ngā Painga o te Kaiwhakaputa Mutunga Ukume Semixlab
● Te tino tika: Te whakahaere i ngā āhuatanga taumata-ISO me te papatahi iti-micron mō te pa o te wafer pumau.
● Te Parakore: He rauemi hototahi 100% ki te rūma ma, he tino kaha te tango hau me te whakamātautau poke.
● Whakaritenga: Kei te wātea i roto i ngā āhua maha (te pupuri taha, te momo korehau, te momo marau) kia ōrite ki ngā pūnaha karetao rerekē.
● Pono: Kua whakamātauhia te mahi roa mō ngā whare hanga haurua-rahi puta noa i te ao.
Ka whakapai tonu ngā miihini o Semixlab i ngā hangarau tukatuka me te paninga uku kia tika ai ngā āhuatanga, kia iti ai te whakaputanga matūriki, kia roa ai te roa o te mahi a ia kaiwhakaputa. E tino tumanako ana mātou ki te whakarato ki a koe i ngā hua ngaio me ngā otinga hangarau kua whakaritea.
to tatou Ratonga
Toa Hua Semixlab
