Ⅰ. He aha ngā āhuatanga tono o ngā hua uku silicon carbide?

E whakamahia whānuitia ana ngā uku silicon carbide (SiC) i roto i ngā wāhanga matua o ngā taputapu tukatuka matua i roto i ngā ahumahi semiconductor me te photovoltaic nā te mea he tino ātete ki te pāmahana teitei, he ātete ki te waikura, he kawe wera teitei, ā, he iti te tauwehenga whānui wera. Ko ngā āhuatanga tono motuhake mō ngā hua noa e whai ake nei:

Waka waro hiko

taumahi:

Ko te SiC Boat te tikanga e whakamahia ana hei kawe i ngā anga (pērā i ngā anga silicon, i ngā anga silicon carbide rānei) mō te tuku me te tūnga i roto i ngā tukanga pāmahana-tiketike.

Nga ahuatanga tono:

Mara tukatuka haurua-arahi: I roto i ngā oumu horapa me ngā oumu whakahāora, me mahi pumau te poti mō te wā roa i roto i te taiao pāmahana teitei neke atu i te 1000°C kia kore ai e rerekē te āhua, e poke rānei te angaanga nā te ahotea wera.

Ahumahi photovoltaic: I roto i ngā taputapu PECVD (plasma enhanced chemical vapor deposition), ka whakamahia te poti hei tautoko i ngā anga silicon hei whakatakoto i te kiriata ārai-whakaata silicon nitride, ā, me tu atu ki te pupuhi plasma auau teitei me te taiao pāmahana tiketike.

Ngongo oumu hākawa waro (Ngongo Tauhohenga SiC)

Mahi: Hei wāhanga matua o te rūma tauhohenga pāmahana-tiketike, ka whakaratohia he āpure pāmahana ōrite me te taiao kore mahi matū.

Nga ahuatanga tono:

Ahumahi hiko-ārahi: I roto i te oumu whakahāngai, me noho pumau te ngongo oumu mō te wā roa i roto i te taiao hāora, i te kohu wai rānei kia kore ai e tukuna ngā poke nā te whakahāngai, te waikura rānei.

Ahumahi photovoltaic: I roto i te oumu tohatoha, ka whakamahia te ngongo oumu mō te tukanga tohatoha phosphorus (pērā i te whakarite i ngā pūtau PERC), ā, he mea tika kia ātete ki te waikura hau waikawa i roto i te āhuarangi POCl₃.

Hoe Cantilever me te Pupuri Waka

Mahi: Ka whakamahia te hoe cantilever hei whakawhiti aunoa i te poti karaihe, ā, ka whakamahia te pupuri poti hei whakatika i te tūranga o te poti karaihe.

Nga ahuatanga tono:

I roto i te tukanga anga haurua-ira, me mau tonu te kaha ā-mīhini o te hoe cantilever i te wā e tere ana te hiki me te tuku kia kore ai e whati i te ngenge wera; me mau tonu te tika o te āhua o te kaipupuri poti i te pāmahana tiketike kia kore ai e peka ke te anga.

Ⅱ. He aha ngā huarahi tono o ngā rauemi silicon carbide i roto i ngā ahumahi photovoltaic me te semiconductor?

Ko ngā tono matua o ngā hua uku silicon carbide e aro ana ki ngā hononga tukanga o ngā momo taputapu e rua:

Tohu tohu	Rauemi karāpiti	Rauemi karawiti silicon
Te pūmahana tino pāmahana	Ngāwari ki te waikura (me tiaki te paninga i te >500°C)	Ārai-waikura (ka taea te tu atu i te hau waikura 1600°C mō te wā roa)
Tuhinga o mua	Ngāwari te waikura e ngā hau waikawa (pērā i te Cl₂, POCl₃)	Te ātete ki te waikura waikawa me te kawakore (tae atu ki ngā mea waikura kaha pērā i te HF, HNO₃)
Te mōrearea o te poke matūriki	He ngāwari ki te whakaputa i te parahanga puehu, ka hua ake he hapa o te anga	He mata mātotoru, kāore he mōrearea o te maturuturunga o ngā matūriki
Te kaha Hangarau	Ngāwari te whakapē i te pāmahana teitei (he nui te tauwehenga whānui wera)	Te pakeketanga teitei (te pakeketanga Mohs 9.2), te ātete kaha ki te ru wera
Te whanaketanga tema	Anisotropy, he nui te mōrearea o te wera nui o te rohe	Te kawe wera teitei (120 W/m`K), te āpure pāmahana ōrite

Ahumahi Photovoltaic

Ouma PECVD: whakamahia hei whakatakoto i ngā kiriata ārai-whakaata (pērā i te silicon nitride). Me ātete ngā wāhanga silicon carbide ki te pupuhi katote i puta mai i te tukunga kanapa i roto i te taiao plasma o te 400~500°C, me te karo hoki i te poke o te kiriata.

Ouma horapa: e whakamahia ana mō te horapa o te phosphorus/boron hei hanga hononga PN. Me ātete ngā ngongo oumu silicon carbide ki te waikura mai i ngā hau POCl₃, BBr₃ rānei i te 800~1000°C, kia rite ai te ōrite o te paninga.

Te ahumahi Semiconductor

Ouma horapa me te oumu waikura:

Ouma horapa: e whakamahia ana mō te tukanga whakamahana i muri i te whakaurunga katote. Me karo ngā poti tioata silicon carbide i te tukunga o ngā poke whakarewa (pērā i te Fe, Ni), ki te kore ka nui ake te rerenga o te wafer.

Omu whakahāora: whakatipuria ngā paparanga hāora hiko i roto i ngā taiao hāora maroke, hāora mākū rānei. Me pupuri tonu ngā ngongo oumu hāora hiko i te iti o te uruhanga hāora i te pāmahana teitei o te 1200°C hei ārai i te matotoru koretake o te paparanga hāora.

Ⅲ. He aha ngā painga o ngā rauemi silicon carbide i runga i te graphite?

Ahakoa he iti te utu me te ngāwari o te tukatuka i ngā rauemi karāhe, he iti iho i te karāhe silicon carbide ngā āhuatanga matua e whai ake nei:

Te tātaritanga take motuhake:

E ai ki ngā tatauranga whakaputa tuturu o Veteksemicon, i roto i te oumu tohatoha haurua-ira, me whakakapi te poti karāpeti i ia 3 marama, i te mea ka roa ake te poti karāpeti silicon mo te neke atu i te 2 tau, ā, ka piki ake te hua wafer ma te 5% ~ 10%.

E ai ki ngā raraunga whakaputa i whakaratohia e Semixlab, i roto i te tukanga photovoltaic PECVD, ka taea e te hoe cantilever silicon carbide te whakanui ake i te whai huatanga o te pākahiko mā te 2%~5% nā te kore o te parahanga matūriki.

Ⅳ. he aha koe i whiriwhiri ai i a Semixlab?

He kaihanga me te kaiwhakarato matua a Semixlab i Haina, kua 20 tau e arotahi ana ki te rangahau i ngā paninga mata o te karāpeti me te SiC. Whai muri i ngā tau o te rangahau me te whanaketanga hangarau, ka taea e tā mātou tukanga paninga SiC te whakatutuki i te parakore neke atu i te 99.98%, ā, ka taea hoki e mātou te whakarite i ngā hua silicon carbide o ngā parakore me ngā utu rerekē kia rite ki ō horopaki tono. Mena kei te hiahia koe ki tētahi hua parakore teitei ake, pērā i te whakapā tika ki ngā hua wafer semiconductor, ka taea e mātou te whakarato paninga CVD SiC, paninga CVD TaC me ētahi atu tukanga i runga i te mata o te rauemi papa hei whakatutuki i ō whakaritenga hangarau tino uaua.