8-inihi SiC whakakikoruatia graphite mowhiti mo SiC Epitaxy

Ngā Āhuatanga Rauemi me te Ā-tinana

Ko te mowhiti karāpeti pania SiC a Semixlab he mea hanga mai i te karāpeti isostatic hei rauemi turanga, ā, whai muri ko te paninga SiC ōrite mō te kohu matū (CVD). Mā tēnei hanganga ahurei ka taurite te kaha, te tika, me te ātete ki ngā āhuatanga tukanga uaua.

Ngā tono i roto i te Tukanga Epitaxy SiC

I roto i te tukanga tipu epitaxial SiC, ko te mowhiti karāhe kua pania ki te SiC he wāhanga atanga hanganga me te mahi i waenga i te wafer, te susceptor, me ētahi atu wāhanga karāhe i roto i te ruma tauhohenga MOCVD, CVD rānei. Ka pā tika tōna mahi ki te kounga o te paparanga epitaxial, te ōritetanga o te kiriata, me te pumau whānui o te tauhohenga — he tawhā nui katoa mō te hanga taputapu hiko SiC hua-teitei.

1. Tautoko me te Whakaritenga o te Wafer

He mea hanga tika te mowhiti karāpeti hei whakarite kia tika te pokapū o te papa whakarewa me te whakanoho mau i te wā e whakatakotoranga ana i te epitaxial pāmahana teitei. Ko tōna pumau āhua i raro i te kawenga wera ka pupuri i te tika o te tūnga o te papa whakarewa me te ārai i te piko o te taha, ka whakarite kia rite te tipu o te paparanga puta noa i te mata o te papa whakarewa.

2. Tohatoha Wera ōrite

I te wā epitaksiya ana te SiC, he mea nui te pupuri i te pikinga pāmahana ōrite puta noa i te wafer katoa kia tutuki ai te matotoru kiriata me te kukū tāpiringa ōrite. Ka āwhina te mowhiti kua pania ki te SiC i te taurite kawenga wera mā te whakapai ake i te whakawhiti wera i waenga i te rohe o te susceptor me te taha wafer, te whakaiti i ngā wāhi wera me te whakarite kia ōrite te hanganga o te paparanga epitaxial ahakoa i ngā pāmahana teitei neke atu i te 1600°C.

3. Te Tiakitanga Taiao Tukanga

Ka pāngia ngā wāhanga karāpiti kāore i pania e te pirau matū me te tukunga matūriki i roto i ngā hau epitaxial tauhohe kei roto ngā hau pēnei i te H₂, te SiH₄, me te C₃H₈. Ko te paninga CVD SiC i runga i te mowhiti he ārai tiaki, e wehe ana i te papa karāpiti mai i ngā hau waikura, ā, ka whakaitihia te poke o te paru, ka ārai hoki i ngā matūriki waro kei uru ki te rohe tipu. Ka hua ake tēnei i te whakapai ake i te ma o te mata o te papa, ā, ka nui ake te hua o te taputapu.

4. Te Whakaiti i ngā Pānga Tapa me te Arotautanga Rere Hau

I roto i ngā pūnaha epitaxy SiC 8-inihi matatau, he wero nui te ōritetanga o te taha. Ka āwhina te mowhiti karāhe kua pania ki te SiC ki te whakau i te rere o te hau laminar tata ki te taha o te wafer, ka ārai i ngā rohe pōrearea, ka whakarite hoki i tētahi taiao paparanga rohe e whakahaeretia ana. Ka whai wāhi tēnei tohatoha rere hau kua arotauhia ki te whakapai ake i te whakahaere matotoru epitaxial taha, ka whakaiti i te para rauemi, ka whakarite hoki i te whakatakotoranga paparanga kounga teitei ahakoa i runga i ngā wafers whānui nui.

5. Hototahi ki ngā Hoahoa Tauhohenga Maha

Kua hangaia ngā mowhiti karāhe pania SiC a Semixlab kia hototahi ki ngā waitohu taputapu epitaxy nui pēnei i a AIXTRON, Veeco, me LPE. Ka taea te whakarite i ngā mowhiti i roto i te āhuahanga, te matotoru o te paninga, me te hanganga atanga kia tino ōrite ki ngā huihuinga susceptor motuhake-reactor, kia taea ai te whakauru maeneene me te mahi pumau puta noa i ngā papaaho epitaxial rerekē.

6. Te Roa o te Ora o ngā Wāhanga me te Pono o te Tukanga

Mā te whakakotahitanga o te kaha miihini teitei o te karāti isostatic me te ātete kakahu tino pai o te CVD SiC, ka whakaatuhia e te mowhiti pania he pakari tino pai i raro i te mahi huringa roa. Ka ātete ki te pakaru moroiti, te waikura matū, me te ngenge wera, ka whakarite i te mahi pumau i roto i ngā huringa tukanga roa, ā, ka whakaitihia te auau tiaki me ngā utu whakahaere i roto i ngā raina whakaputa epitaxy nui-rahi.

Ngā Painga o Semixlab

Neke atu i te rua tekau tau o te tohungatanga ki te epitaxy semiconductor me ngā hangarau paninga uku matatau, ka whakaratohia e Semixlab ngā ​​otinga whānui mō ngā wāhanga SiC tino parakore.

To tatou Painga Matua:

●Te Hanganga Ritenga: Ngā rahi kua whakaritea, te matotoru o te paninga, me te āhuahanga e ai ki ngā hoahoa tauhohenga motuhake (AIXTRON, Veeco, LPE, me ētahi atu).

●Tautoko Tauira: Kei te wātea te ratonga hanga tauira tere me te ratonga tauira hei aromatawai me te whakamana tukanga.

●Whakawhitiwhitinga Hangarau: Ka whakaratohia e ngā miihini mohio ngā tohutohu i mua i te hoko me te whakauru tukanga hei whakapai ake i te mahi me te roa o te wā.

●Whakapūmau Kounga: Ka tirotirohia ia wāhanga, ka inehia te matotoru o te paninga, ka whakamātautauhia hoki i te pāmahana teitei i mua i te tukunga.