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Kaihanga Ārai Karawhite Paninga CVD SiC mō te MOCVD me te Epitaxy
Kei a Semixlab ngā kaiwhakapūmau karāhe kua pania ki te CVD SiC mō ngā mahi semiconductor pāmahana teitei – ka uru katoa te MOCVD, te epitaxy, me te tukatuka wafer ki roto i tā rātou whakamahinga. Ka tīmata ia kaiwhakapūmau me te turanga karāhe parakore teitei, kātahi ka whiwhi i te paparanga ōrite o te silicon carbide e pania ana mā te whakatakotoranga kohu matū. Ka hoatu e te karāhe he urupare wera pai ki a koe, ko te SiC ka tāpiri i te koretake matū me te pakeke o te mata.
Whakaahuatanga
Overview hua
I roto i te tipu epitaxial, he pānga tika tō te susceptor ki te āhua o te wera ōrite o ngā wafers me te pumau o te taiao tipu puta noa i te oma. Ko ngā susceptor kua pania ki te CVD SiC a Semixlab he mea hanga mai i te graphite matotoru, ā, kua pania ki tā mātou tukanga SiC. He aha ngā hua ka puta mai i a rātou?
● He pai te kawe wera
● Ngā āhua pāmahana ōrite puta noa i te papa
● Ātete pakari ki ngā matū tukatuka
● He iti te maturuturunga o ngā matūriki
● Te roa o te ora o te wāhanga i ngā rohe wera
Ka hangaia e te paninga CVD he kiri SiC matotoru hei tiaki i te karāpeti mai i ngā hau kaha, ā, ka whakanui ake i te pakari whānui o te wāhanga.
Āhuatanga matua
Papanga Graphite Parakore Teitei
Ka whakamahia e mātou ngā momo karapiti e hoatu ana ki a koe:
● He iti te maha o ngā poke
● Tauhohenga ā-pūkaha e taea te matapae
● Te kawe wera rawaka
● He pai te ātete ki te ru wera
Ka mau tonu tēnei karāpiti i ngā huringa whakamahana me te whakamatao tere.
Paninga CVD SiC ōrite
Ka whakaratohia e te paparanga SiC:
● Te pakeke o te mata
● Te parenga waikura pai
● Kua whakapaitia te ātete ki te waikura
● He iti ake te mōrearea o te poke
Ka taea te whakarerekē i te matotoru o te paninga me te āhua o te mata kia rite ki tāu tukanga.
Te ōritetanga wera tino pai
Kāore e taea te whiriwhiri i tētahi papa wera pumau mō te epitaxy. Mā te hononga o te arataki o te graphite me ngā āhuatanga o te mata o te SiC ka āwhina i te whakatutuki i:
● Ngā pāmahana papatahi ōrite
● He tukatuka pumau ake
● He pai ake te auautanga mai i te oma ki te oma
Pūmautanga Teitei Te Manawao
Kua hangaia ēnei ārai hei whakahaere i ngā āhuatanga uaua o te haurua-ā-ira:
● Ngā pāmahana whakahaere teitei
● Huringa wera auau
● Te pumau o te tukanga mō ngā wā roa
He aha i whiriwhiri ai koe i a Semixlab?
Hangarau Paninga CVD Matatau
He wheako ā-ringa tō mātou ki ngā rauemi waro me te paninga CVD, ā, ka taea e mātou te whakarite i ngā wāhanga karāwhata kua pania ki te SiC kia rite ki tāu tono haurua-ā-ira.
Te Pūkenga Hanga Whakarite
Ka whakahaerehia e matou:
● Nga tauira
● Ngā oma iti
● Te whakaputanga nui
● Ngā rahi me ngā hoahoa ritenga
Mana kounga
Ka tirohia ia wāhanga mō:
● Te tika o ngā āhuatanga
● Āhua o te mata
● Te ōritetanga o te paninga
● Te whakawhirinakitanga o te tukanga
Whakatakotoranga
| Te nama take | Whakapūtātanga |
| Hua | Pūwero Whakapūmau i te Karawhita Kua Pania ki te CVD SiC |
| Papanga Papainga | Karāwhite Parakore Teitei |
| Rauemi whakakikorua | Carbide Hiraka CVD (SiC) |
| Te Parakore o SiC | ≥99.999% (Noa) |
| Temperature Whakahaere | Tae atu ki te 1600°C (e whakawhirinaki ana ki te tukanga) |
| Te Whakanohono i te Maaka | whakaritenga |
| Mutu mata | Whakaritea mō ia tono |
| diameter | Whakaritea |
| Taupānga | MOCVD, Epitaxy, Tukatuka Ārahi-Haumaru |
tono
| Momo taputapu | Ngā Tukanga Noa | Ngā Rauemi Angiangi |
| Ngā Tauhohenga MOCVD | Te epitaxy GaN LED, te tipu o te haurua-haurua matū, te whakatakotoranga kiriata-angiangi | GaN, InGaN, AlGaN |
| Ngā Pūnaha Epitaxy | Te tipu epitaxial SiC, te epitaxy semiconductor III-V | SiC, GaAs, InP |
| Ngā Utauta Tukatuka Wafer | Tautoko pāmahana teitei, whakamātautau R&D | Hiraka, SiC, GaN |
to tatou Ratonga
Toa Hua Semixlab
