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MoCVD SiC Whakakikorua Graphite Susceptor
| Wahi o te Origin: | China |
| Ingoa Brand: | Semixlab |
| Tau Tauira: | MSCGS-01 |
| Tiwhikete: | ISO9001 |
| Waehu Whakarite Rawa: | 1 huinga |
| Utu: | Whakapaa atu mo te Whakaaetanga Whakataunga |
| Taipitopito Packaging: | Putea kaweake |
| Wā Tukunga: | 35-40 Ngā Rā i Muri i te Whakaū o te Ota |
| Ngā utu: | T / T |
| Supply āhei: | 1000 huinga / Marama |
Whakaahuatanga
1. Kua roa ake te ora mā te 300%+
Mā te hangarau paparanga ārai ka taea te neke atu i te 5,000 ngā huringa ru wera (iti iho i te 1,500 ngā wā mō ngā hua tuku iho).
Ka taea e te pāmahana mahi tonu te eke ki te 1650°C, ā, kāore he ngatata, he tihore rānei o te paninga.
2. Taurangi kore parahanga
Ko te parakore o te paninga SiC he 6N te taumata (te tapeke o ngā poke whakarewa < 0.5ppm).
I paahitia te whakamātautau tukunga matūriki paerewa SEMI (te ma o te Akomanga 10).
3. Whakapai ake i te ōritetanga o te papa wera
He iti iho i te ±2°C te rerekētanga pāmahana i runga i te mata turanga (ngā raraunga ine mō te whakatakotoranga Φ300mm).
Tautoko ana i te whakamahana tere (20°C/s) me te kore e rerekē te āhua o te wera.
4. Tino pai te aukati waikura
Ātete ki te waikura i ngā hau pēnei i te H2, NH3, me te TMAl, ā, neke atu i te 18 marama te roa o te ora.
He iti iho i te 5% te tere whakarerekētanga o te taratara o te mata (i whakamātauria i muri i te 100 huringa tukanga).
5. Hototahi ki ngā tauira rongonui o te ao
Ka tautoko i te whakaritenga i ngā diameter mai i te 50 ki te 500mm.
6. Te arotautanga utu mō te huringa ora katoa
Kua whakaroahia te huringa tiaki ki te toru ngā wā i tō ngā hua noa.
Kua piki ake te tere hua o ngā papa epitaxial mā te 2-3%.
Te Kaha o te Kamupene
E rua ngā pokapū R&D a Semixlab Technology Co.,Ltd, e rua ngā turanga whakaputa, e 12 ngā raina whakaputa, e 150+ ngā kaimahi, ā, neke atu i te 30% te haumitanga ki te R&D. Ko te nuinga o ā mātou hua e whakamahia ana i roto i ngā ahumahi LED, IC integrated circuit, semiconductor o te whakatupuranga tuatoru, photovoltaic me ētahi atu. He kaha ngā āheinga R&D, whakaputa me te whakamātautau me te manatoko a Semixlab. I taua wā anō, kei te whakapai tonu mātou i ā mātou hangarau me ngā taputapu me te haumitanga o ngā tekau miriona ia tau.
Whakatakotoranga
Ngā tawhā mahi matua
Ngā tawhā kaupapa
Ko te rauemi turanga he SGL isostatic pressed graphite
Matotoru paninga: 80-200μm (ka taea te whakarite)
Ko te parakore o te paninga he ≥99.9999%
Kiato: 1.85-1.90 g/cm³
Te kawe wera: 125 W/m·K (RT)
Kaha piko ≥45 MPa
Te pāmahana whakahaere ≤1800°C (hau kore mahi)
Pūnaha whakaū kounga
Te whai i te tukanga katoa: Te tuhi raraunga katoa mai i te papa graphite ki te tukanga paninga.
Te kimi tika: Te tātari paninga SEM/EDS, te kimi turuturu i te inenga papatipu helium, te whakamātautau ru wera pāmahana teitei.
| Ko nga ahuatanga taketake o te paninga CVD SiC | |
| Āhuatanga | Te Uara Tino |
| Hanganga Kiriata | Te āhua polycrystalline o te FCC β, te nuinga o te whakatakotoranga (111) |
| kiato | 3.21 g / cm³ |
| pakeke | 2500 te pakeke o Vickers (kawenga 500g) |
| Rahi o te Witi | 2 ~ 10μm |
| Te maamaa matū | 99.99995 orau |
| Raukaha Raukaha | 640 J·kg-1·K-1 |
| Te Mahana Whakararo | 2700 ℃ |
| Te Kaha Awhina | 415 MPa RT 4-tohu |
| Young's Modulus | 430 Gpa 4pt piko, 1300℃ |
| Mahinga Ngawha | 300W·m-1·K-1 |
| Roha Ngawha(CTE) | 4.5 × 10-6K-1 |
Ngā āhuatanga ā-tinana taketake o te paninga CVD SiC:
tono
Ngā horopaki tono, ngā taputapu rānei: Ngā taputapu Aixtron Epi
Ko nga ahuatanga tono matua
● Te hanga maramara LED: Te tipu epitaxial o te GaN kikorangi/mā LED.
● Ngā haurua hiko: Ngā taputapu hiko SiC/GaN (MOSFET, HEMT).
● Ngā taputapu auau reo irirangi 5G: he papa maramara auau reo irirangi ngaruiti auau teitei.
● Taiaho taiaho: VCSEL, tukanga epitaxial taiaho tuku-taha.
● Tākai matatau: Te whakatakotoranga o ngā kiriata angiangi haurua-haurua tino tika.
He tirohanga whānui mō te mekameka ahumahi epitaxy maramara haurua-waenga:
to tatou Ratonga
Toa Hua Semixlab
