Pūwhakamarumaru Wera Tere

I roto i ngā tukanga haurua-whakamua matatau, he mahi nui tā te Tukatuka Tere Tere (RTP) ki te whakatutuki i te whakahaere wera tika mō te whakahohenga tāpiri, te hanganga silicide, me te whakamahana dielectric. Kei te ngākau o ia pūnaha RTA, ko te Rapid Thermal Annealing Susceptor te hononga wera matua i waenga i te pūtake wera me ngā papa silicon, e pā tika ana ki te ōritetanga o te pāmahana me te pumau o te tukanga. Kua hangaia te RTA Susceptor a Semixlab mō te huringa wera pāmahana-teitei, poto-wā, e whakarite ana i te whakawhiti wera ōrite me te whakahoki i raro i ngā tikanga whakamahana me te whakamatao tere e kitea ana i roto i ngā tikanga Tukatuka Tere Tere (RTP) matatau.

Ko te Susceptor Graphite Paninga-SiC a Semixlab he mea hanga mai i te grafit tino-teitei, e tuku ana i te kawe wera tino pai me te papatipu wera e whakahaeretia ana mō te urupare pāmahana tere me te whakaiti i te whakaroa wera. Kua pania te papa grafit ki te paparanga tiaki silicon carbide (SiC) kore e mahi e whakarei ake ana i te pumau o te mata, e pehi ana i te whakaputanga matūriki, ā, e whakapai ake ana i te ātete ki te ru wera, te waikura, me te waikura matū.

I roto i ngā tukanga RTP, he mahi nui tā te RTA Susceptor ki te whakapūmau i te papa wera puta noa i te mata o te papa whakarewa. Mā te mimiti pai i te pūngao hihi me te tuku anō i te pūmau, ka whakaitihia e te susceptor ngā pikinga pāmahana i roto me waenga i ngā papa whakarewa. He mea nui tēnei pūmautanga mō te whakatutuki i te mana whakahaere tika mō te ātete kiriata angiangi i te wā e whakahohehia ana te whakaurunga katote, te pupuri i te pūmautanga o te wāhanga i te wā e hangaia ana te silicide whakarewa, me te ārai i te ahotea kiriata kore taurite i te wā e whakamahana ana i te hiko.

Kua arotauhia te Wafer Heating Susceptor a Semixlab kia hototahi ki ngā tūāpapa taputapu RTP me RTA matua, e tautoko ana i ngā rahi wafer 200 mm me 300 mm. Ko tōna mata kua pania ki te SiC he iti te putanga hau me te pumau pai o te tukunga i roto i ngā huringa wera maha, e āwhina ana ki te pupuri i te whakatikatika pāmahana tika me te whakaiti i te wā kore mahi o ngā taputapu nā te poke, te tiaki rānei.

Mai i te tirohanga hangahanga, ko te Rapid Thermal Annealing Susceptor a Semixlab he wāhanga tukanga nui e awe ana i te ōritetanga hiko, ngā reiti hapa, me te whai huatanga whānui o ngā taputapu (OEE). Mā te whakauru i ngā rauemi parakore teitei, te hangarau paninga kua whakamātauhia, me te hoahoa e aro ana ki te tukanga, ka tukuna e Semixlab he otinga papa RTA matatau e whakarite ana i te mahi wera pumau, e whakaiti ana i ngā mōrearea poke matūriki, ā, e tutuki ai te pumau tukanga mō te wā roa. Ko te mea nui ake, e whakapau kaha ana a Semixlab ki te whakarato i te hangarau matatau me ngā otinga RTA susceptor ritenga mō ngā tukanga RTP semiconductor. E tino tumanako ana mātou ki te noho hei hoa mahi roa māu i Haina.