CVD SiC paninga angiangi susceptor

Ko te arotahi a Semixlab ki te whakawhanake me te whakaputa i ngā paninga silicon carbide (SiC) tino parakore, ā, e whakapau kaha ana ki te whakarato i ngā otinga mahi teitei mō te umanga semiconductor. Mā te hangarau matū matatau o te whakapūtanga kohu (CVD), ka whakaratohia e mātou he ratonga paninga ritenga mō ngā wafer suceptors kia pai ai te mahi i roto i ngā taiao tukanga tino kino.

Mā te hangarau CVD ka hangaia e mātou he paninga β-SiC tino parakore (te aronga karaihe (111)) ki runga i te mata o te papa graphite tino parakore, ā, i te wā kotahi, he ātete pāmahana tino teitei, he ātete waikura, ā, he kaha tohatoha wera ōrite. He hua e tika ana mō Aixtron, Veeco me ētahi atu taputapu tipu epitaxial matua, e whakamahia whānuitia ana i roto i te GaN/GaAs me ētahi atu tipu epitaxial.

Ko te papa o te papa paninga CVD SiC he mea hanga ki te karāpeti SGL tino parakore, ā, ka whakatipuria he paninga silicon carbide matotoru ki runga i tōna mata mā te tukanga whakatakoto kohu matū (CVD). Ka mahia tēnei tukanga i roto i tētahi rūma tauhohenga pāmahana-tiketike, ā, ka whakarite i te pono o te paninga ki te āhua nanoscale mā te whakahaere tika i te ōwehenga o te pūtake silicon (hei tauira, te methyltrichlorosilane) ki te hau pūtake waro, te pikinga pāmahana (i waenga i te 1000°C me te 1400℃) me te tere whakatakoto. Ka taea te whakarite i te matotoru o te paninga kia rite ki ngā whakaritenga tono, mai i te torutoru microns ki te tekau microns, kia tutuki ai ngā whakaritenga kaha miihini i ngā pāmahana tino nui, me te karo i te mōrearea o te pakaru ahotea nā te matotoru rawa.

I roto i te tipu epitaxial LED, me tu te paepae wafer ki ngā pāmahana teitei tere tonu i runga ake i te 1600℃ me te huringa wera tere. Nā te mea he teitei te ira rewa (tata ki te 2700℃), he iti te tauwehenga o te whakawhānui wera (4.5×10^-6/K) me te kawe wera pai rawa atu (~120 W/m·K), ka taea e te paninga CVD SiC te pupuri i te pumau āhuahanga i raro i ngā pikinga pāmahana nui, me te karo i te piko o te wafer, i ngā kapiti moroiti rānei i puta mai i te ahotea wera. Hei tāpiri, ko te koretake matū o te SiC e whakaatu ana i te ātete waikura kaha i roto i ngā hau waikura (pērā i te HCl, H₂) te taiao, ka whakaiti nui i te parahanga poke i puta mai i te whakapūngāwerewere, i ngā tauhohenga taha rānei i te wā o te tukanga, ā, ka whakapai ake i te ōritetanga o te paparanga epitaxial i runga i te mata o te paparanga me te hua o te taputapu.

E whakamahia whānuitia ana te hua i roto i te hanga semiconductor o te tuatoru o ngā whakatipuranga, te hanga maramara LED mana-teitei. Hei tauira, i roto i te tukanga whakapūmau matū whakarewa-organic (MOCVD) mō ngā taputapu RF GaN-on-SiC, ka tutuki i te paepae CVD SiC te ōritetanga pāmahana i roto i te ±1℃ o te mata o te paparanga mā te hoahoa tohatoha mara wera tika, kia mōhio ai ko te matotoru o te paparanga epitaxial he iti iho i te 1%. I taua wā anō, ko ōna āhuatanga tuku matūriki iti (kiato matūriki <0.1/cm²e ai ki te inenga a te SEM-EDS) he mea tino pai i roto i ngā taiao rūma tino ma, he mea tino pai mō ngā pūnga tukanga matatau e pāngia ana e ngā hapa (pēnei i ngā tukanga āwhina mō ngā maramara arorau i raro i te 5 nm).

Ki te whakatauritea ki ngā paepae wafer tuku iho, ka taea te whakaroa i te roa o te mahi a te wafer paninga CVD SiC hypnotic mā te 3-5 ngā wā. Mā ōna āhuatanga horoi-ake o te mata ka whakaitihia te auau tiaki, ā, mā te whakamahi tahi me te hangarau whakahou paninga ā-rohe ka taea te whakatika, ka whakaitihia te huringa hokinga mai o te haumi mā te neke atu i te 40%. E ai ki ngā raraunga ine ahumahi, ka taea e te raina whakaputa epitaxial SiC 6-inihi e whakamahi ana i tēnei hua te whakaiti i ngā rerekētanga tukanga i waenga i ngā puranga mā te 15%, te whakanui ake i te kaha whakaputa ā-tau mā te 20%, me te whakaiti i te tere para nā te parahanga ki raro iho i te 0.03%.

Mai i te rangahau me te whanaketanga taiwhanga ki te whakaputanga nui, ko te taputapu hypnotic CVD SiC a Semixlab kua aro tonu ki te kaiārahi o te umanga. Ehara i te mea he tukanga pau noa iho, engari he pou hangarau anō hoki i roto i te mara o te hanga tika i te pāmahana teitei. Ka haere tonu tana whakarato i te taurangi pono mō te hanga taputapu teitei i roto i ngā mara matatau pēnei i te whakawhitiwhiti kōrero 5G, te hikohiko hiko pūngao hou, me te rorohiko irahiko.

Te Tautoko Wafer me te Whakawhiti Wera i roto i ngā tukanga MOCVD, tae atu ki te LED kikorangi me te kakariki, te LED UV me te LED UV-hohonu me ētahi atu, e urutau ana ki ngā taputapu mai i LPE, Aixtron, Veeco, Nuflare, TEL, ASM, Annealsys, TSI me ētahi atu.

Hangarau matua: Te tukanga CVD hei whakatutuki i te (111) whakatakotoranga β-SiC, te rahi o te witi 2-10μm, te hanganga matotoru.

Te urutaunga taiao tino kino: te ātete ki te waikura pāmahana teitei, te ātete ki te horo o te toto, te pungarehu < 5ppm.

Te whakahaere wera tino pai: Ko te kawe wera o te 300W/m·K, he tino ōrite te CTE ki te karāpeti hei karo i te pakaru o te ahotea wera.

Ratonga tukatuka katoa: Tautoko i te tukatuka papa, te whakatakotoranga paninga, te whakamātautau i te tuku kotahi-mutu.