Kopae Tautuhi Whakakikorua SiC

Te Hanganga Kōpae Huinga Panipani SiC

Ko te Kōpae Huinga Paninga SiC Semixlab he kaikawe wafer i hangaia mō ngā taputapu Aixtron MOCVD. E rua ngā wāhanga matua o tēnei kōpae:

1. Rauemi papa: karāhe isostatic tino parakore

Ngā āhuatanga o te rauemi: te kawe wera tino teitei (tae atu ki te 180 W/m·K), te pumau kaha i ngā pāmahana teitei, kāore e ngāwari te whakapēke, te pakaru rānei.

Ngā Painga: Ka whakarato i te ōritetanga wera pai me te kaha hanganga mō ngā papa, he kaupapa nui tēnei hei whakarite i te ōritetanga o te tukanga tipu.

2. Paninga mata: Te whakatakotoranga CVD o te SiC tino parakore (te karawiti silicon)

Tikanga whakatakotoranga: Ka whakamahia te tukanga CVD whakarei-plasma, te tukanga CVD wera rānei, ā, ka whakahaeretia te matotoru o te paninga i waenga i te 50–200μm.

Whakaahuatanga āhuatanga: He matotoru te paparanga mata, kāore he pūwero, ko te kaha miihini o te pakeke Mohs e tata ana ki te 9, ā, he tino ātete ki te waikura me te pānga o te pāmahana tiketike.

He aha i whiriwhiri ai koe i a Semixlab?

Mena kei te rapu koe mo:

● Kōpae Huinga Paninga SiC mahi-teitei mō ngā pūnaha Aixtron.

● Ngā otinga kawe e tautoko ana i ngā rahi ritenga, ngā ratonga whakahou me ngā taiao waikura pāmahana teitei.

● Ngā wāhanga kounga teitei e whakapai ake ana i te hua MOCVD me te whakaroa i ngā huringa pumau o te tukanga.

Tena koa whakapā mai ki a mātou inaianei kia whiwhi ai koe i ngā whakatau tata me ngā whakaritenga hangarau hou. Ka whakaratohia e mātou he ratonga tuku ā-ao me te tautoko hangarau hei āwhina i a koe ki te whakatinana tere ki tō raina whakaputa.

Te tātaritanga o ngā āhuatanga ā-tinana matua

1. Te ātete teitei o te pāmahana

Ka taea e te rohenga o runga o te pāmahana whakahaere te eke ki te 1600°C+. E kore te hanganga paninga e ngatata, e tihore rānei i te ahotea wera, ā, ka taea te tu atu i te taiao tauhohenga MOCVD huringa roa.

2. Te kawe wera me te ōritetanga wera

Mā te whakakotahitanga o te papa me te paninga ka pai ake te kawe wera, ā, ka karohia hoki ngā hapa tipu o te papa i puta mai i te wera kore taurite. Mā te ōritetanga o te kawe wera ka whakarite kia rite te tohatoha o te matotoru me te hanganga o te whakatakotoranga, ā, ka pai ake te hua.

3. Ātete ki te waikura matū

Ka taea e te paninga te ātete pai ki ngā hau tukatuka MOCVD tino waikura pērā i te hauwai, te haukini, te TMGa, me te TMAl. He hanganga β-SiC tino matotoru te rauemi tonu, ā, kāore rawa he tauhohenga taha e puta mai ana me te hau tauhohenga.

4. Te whakahaere matūriki mata

He iti te taratara o te mata paninga (Ra<0.5μm) ā, he uaua ki te mimiti i ngā matūriki, ki te tihore rānei. Whakaitihia te poke o ngā matūriki iti o te tukanga, he mea tino pai mō ngā tukanga angiangi nui e 6 inihi te roa, neke atu rānei.

Ngā horopaki tono hua me ā rātou mahi

1. I hangaia mō te hanganga Aixtron Planetary Reactor

E pā ana ki ngā rūma tauhohenga o ngā hanganga tēpu hurihuri aorangi pēnei i te AIX 200 me te AIX 2800G4.

He mea hanga tika te hanganga o te kōpae hei whakarite i te ōritetanga o te wera me te taurite o te rere o te hau i te wā e hurihuri ana.

2. He tūranga nui i roto i te epitaxy semiconductor matū

E pā ana ki te tipu epitaxial MOCVD o ngā rauemi matū III-V rerekē, tae atu ki ēnei engari kāore e herea ki:

● GaN/AlGaN: mō ngā rama LED, ngā taiaho, ngā taputapu hiko.

● AlN, InGaN: mō ngā rama UV LED me ngā taputapu auau-tiketike.

● Epitaxy GaAs/InP: mō ngā taputapu hiko tere-teitei me ngā maramara whakawhitiwhiti kōrero taiaho.

Te mekameka ahumahi epitaxy maramara haurua-whakahaere:

Ngā toa kōpae huinga paninga SiC Semixlab