LPE SiC EPI Halfmoon

Ko te LPE SiC EPI Halfmoon he wāhanga tino tika i hangaia mō ngā pūnaha tipu epitaxial SiC, inā koa ko te Liquid Phase Epitaxy (LPE) me ngā tauhohenga CVD/LPE ranu e whakamahia ana i roto i ngā tukanga whakatakotoranga SiC pāmahana teitei.

Ko tōna hanganga karāpiti kua pania ki te CVD TaC e whakarite ana i te ātete tino pai ki te pirau wera me te matū, ā, ko tōna āhua haurua-marama e whai wāhi nui ana ki te whakatau i ngā mara rere wera me te hau i roto i te rūma tauhohenga.

Ngā tono i roto i te SiC Epitaxy

Kei raro nei he whakamārama taipitopito o ōna mahi puta noa i ngā āhuatanga nui maha o te tukanga epitaxy SiC:

1. Te ōritetanga me te whakahaere o te papa wera

He mea nui te tohatoha wera ōrite ki te whakatutuki i ngā paparanga epitaxial SiC kounga teitei. I roto i te taiao tauhohenga LPE, ka taea e ngā pāmahana te neke ake i te 1600–1800°C, me ngā pikinga e pā tika ana ki te matotoru o te paparanga epitaxial, te kukū tāpiringa, me te hanganga hapa. Ko te EPI Halfmoon te wāhanga taurite wera e:

● Ka whakaata me te tohatoha anō i te wera hihi puta noa i te rohe papatahi, ka whakaiti i ngā pikinga pāmahana poutū me te radial;

● Ka whakarei ake i te ōritetanga wera i roto i te tauhohenga, ka whakau i te hononga i waenga i te papa me te pūtake silicon-waro rewa;

● Ārai i te wera nui o te rohe, ā, ka whakarite kia tere te tipu o te tioata SiC.

2. Te Tohatoha Rere Hau me te Arotautanga Taiao Tauhohe

He mea hanga motuhake te hanganga o te haurua-marama hei whakarerekē i te tere me te ahunga o te rere o te hau i roto i te tauhohenga.

I roto i te epitaxy SiC, me pupuri tonu e ngā hau matūmua pērā i te SiH₄, te C₃H₈, me te H₂ te rere o te wai me te tohatoha ōrite hei ārai i ngā tere tauhohenga ā-rohe me te hanganga matūriki. Ka whai wāhi te EPI Halfmoon ki tēnei mā te:

● Te ārahi i te rere o te hau i ngā ara rere kua arotauhia, te ārai i ngā rohe whakaroa me te whakarite kia ōrite te tukunga o te matū mua;

● Te whakatairanga i te kawe papatipu ōrite o ngā momo Si me C ki te mata o te papa, me te whakaiti i ngā hapa iti me te puranga takahanga;

● Te whakapakari ake i te tango hau putanga hei ārai i ngā tauhohenga tuarua, i te kohikohinga poke rānei ki ngā pakitara o te rūma.

3. Te Tiaki Matū me te Whakahaere Parakore o te Mata

I roto i ngā huringa tipu epitaxial roa, ka ngawari ngā wāhanga graphite kāore i tiakina ki te horo matū, te horapa waro, me te poke hau. Mā te paninga CVD TaC i runga i te Halfmoon ka whakaratohia:

● He ārai matū kore e ārai i ngā hau kaha pērā i te H₂, te SiH₄, me ngā mea whakairo e hangai ana ki te Cl₂;

● Te pehi kaha i te parahanga o te kohu waro, kia kore ai he momo waro kāore e hiahiatia e horapa ki te paparanga epitaxial;

● Te whakapai ake i te ma o ngā rūma me te roa ake o ngā wā tiaki.

4. Hototahi me te Whakauru

Ka taea te whakarite i te LPE SiC EPI Halfmoon a Semixlab kia honoa ki:

● Ngā tauhohenga poutū LPE, e mahi ana hei whakaata o runga, o taha rānei mō te taurite wera;

● Ngā rūma CVD-LPE whakapae, ranu rānei, hei whakaū i te rere o te hau, hei ārai rānei i te whakaurunga;

● Ngā pūnaha OEM mai i ngā kaihanga taputapu epitaxy nui pēnei i a Aixtron, LPE, me Veeco.

Ka hangaia ia Halfmoon kia tino tika te āhua i roto i te ±0.05 mm, kia kore ai e neke te whakaurunga me te iti o te raruraru rere i roto i ngā taiao he nui te korehau, he nui rānei te hauwai.

I roto i te tipu epitaxial SiC, ka pāngia te kounga o te wafer me te hua o te taputapu e ia nekehanga rerekētanga pāmahana me ia taurite koretake o te rere hau. Ka aro atu a Semixlab LPE SiC EPI Halfmoon ki ēnei wero me te whakakotahitanga pūtaiao o te hangarau tika o te karāhe me te hangarau paninga CVD TaC, e tuku ana i te mana whakahaere kore e taea te whakarite ki te wera, te hau, me te parakore - ko ngā turanga e toru o te epitaxy SiC mahi teitei. Nau mai ki te whakapiri mai ki a mātou mō ētahi atu kōrero hangarau me te hoahoa ritenga.