Ngā Mowhiti Hiri Karāhe Isostatic Teitei-Parakore

Ko ngā Mowhiti Hiri Karāhe Isostatic Teitei-Ma mai i Semixlab he mea hanga mai i te karāhe tino-ma kua pēhia kia rite ki te isostatic, ka whakaratohia e ēnei mowhiti hiri he mahi hiri pumau, iti-paru e tautoko tika ana i te pono o te tukanga, te ōritetanga hua, me te wā mahi o ngā taputapu puta noa i ngā tukanga hanga wafer pito-mua matatau.

I roto i ngā pūnaha epitaxy, he mea nui te whakahaere tika i te rere o te hau, te pumau o te pēhanga, me te ōritetanga o te wera, he mea nui ngā Mowhiti Hiri Karāhe Isostatic Teitei-Ma ki te pupuri i te pono o te tauhohenga i ngā pāmahana pumau e neke atu ana i te 1000 °C. Ina tāutahia ki ngā atanga rūma, ki ngā rohe hiri, me ngā hononga hurihuri, tū rānei i roto i te rohe wera, ka whakaatuhia e ēnei mowhiti hiri he iti me te isotropic te whakawhānui wera, e āhei ai rātou ki te pupuri i te pumau o te taha i te wā e huri haere ana te huringa wera. Ko te iti rawa o te poke whakarewa ka whakaiti i te tūponotanga o te whakaurunga dopant kāore i te whakaarohia, te poke whakarewa rānei, ka āwhina i te whakarite i te matotoru o te paparanga epitaxial ōrite, ngā kōtaha doping whakahaeretia, me te tipu tioata kounga teitei i roto i ngā tukanga epitaxy silicon me te semiconductor compound.

I roto i ngā tono CVD, LPCVD, me PECVD, ka whakaatuhia ngā wāhanga hiri ki te huinga o ngā hau pāmahana teitei, te korehau, ngā hau mua waikura, me ētahi atu taiao plasma. E whakamahia whānuitia ana ngā Mowhiti Hiri Karapa Isostatic Teitei-Ma a Semixlab i roto i ngā hiri tatau rūma, ngā hanganga wehe hau, me ngā rohe whakawhiti i waenga i ngā rohe wera me te makariri o te tauhohenga. Mā te ātete matū ā-roto o te karapa para-teitei ka taea te mahi pumau i te aroaro o ngā hau tukanga kaha pēnei i te HCl, NH₃, me ngā mua halogen, i te mea ka whakaitihia e te hanganga moroiti matotoru, isotropic te whakaputanga matūriki me te pirau miihini i roto i te roanga o te ora ratonga. Ki te whakatauritea ki ngā otinga hiri whakarewa, ka tukuna e ngā mowhiti hiri karapa he ātete pai ake ki te waikura me te ngenge wera, ka whai wāhi ki ngā wā tiaki roa ake me te whakapai ake i te auautanga tukanga i roto i te hanga nui-rahi.

Ko te horapa pāmahana teitei, te waikura, me te tukatuka wera tere e whakararu ana i te mahi hiri nā te mea he tino pāmahana, he tere te pikinga wera, me te huringa tukanga auau. I roto i ēnei taiao, ka mau tonu te pono o te hiri o ngā Mowhiti Hiri Karapa Isostatic Teitei-Ma i ngā pāmahana neke atu i te 1100 °C, e tautoko ana i te whakahaere hau pumau i roto i ngā ngongo oumu me ngā rūma RTP. Ko ngā āhuatanga miihini ōrite e whakaratohia ana e te pēhi isostatic ka āwhina i te aukati i te kukū ahotea ā-rohe, te pakaru moroiti, me te whakapōturi hiri i te wā e tere ana te whakamahana me te whakamatao, ā, ka whai wāhi ki ngā kōtaha horapa dopant pumau, te tipu waikura ōrite, me ngā putanga tukanga wera ka taea te whakahoki anō he mea nui mō te hanganga taputapu arorau me te mahara matatau.

I roto i te tukanga Etch, tae atu ki ngā tono etch maroke ana e whakamahi ana i ngā matū halogen me ngā taiao āwhina-plasma, me mau tonu ngā mowhiti hiri hei pupuri i te pono o te korehau me te whakawhāiti i te whakaputanga matūriki me te pirau matū. Ko ngā Mowhiti Hiri Graphite Isostatic High-Purity a Semixlab ka whakatakotoria i roto i ngā rohe whakaaturanga plasma kore-tika, pērā i ngā atanga hiri taha rūma me ngā rohe wehe hanganga. Ina honoa ki te whakakī mata tika, ki ngā paninga tiaki rānei, ka whakaratohia e ēnei mowhiti hiri he ātete pono ki ngā hau etch waikura me te ahotea wera, ka tautoko i ngā āhuatanga rūma pumau me te whakaiti i te mōrearea o te ngaronga hua e pā ana ki te poke.

I hangaia me te arotahi ki te parakore o ngā rauemi, te pumau o te hanganga, me te pono mō te wā roa, ko te hototahitanga o te Mowhiti Hiri Karapa Isostatic Teitei-Parakore a Semixlab me ngā hangarau paninga matatau me te whakaurunga ki ngā hoahoa taputapu semiconductor matatini ka waiho hei otinga pono mō ngā pona tukanga matatau me ngā pona pakeke. Mā te tuku i te mahi hiri pumau i raro i ngā tikanga tukanga tino uaua, ka tautoko a Semixlab i ngā kaihanga semiconductor ki te whakatutuki i te hua teitei ake, te whakamahinga taputapu pai ake, me te utu katoa o te mana whakahaere iti iho. Kei te tino tumanako mātou ki te noho hei hoa mahi roa māu i Haina.