Waka graphite PECVD mō te PV

Ko te Waka PECVD (Waka Whakatakoto Matū Whakarei Plasma) he taputapu kawe tukanga matua i hangaia mō te umanga photovoltaic, e whakamahia ana i roto i te wāhanga whakatakotoranga kiriata angiangi o te hanga pūtau solar tino pai. He mea hanga ki ngā rauemi parakore teitei me te ātete ki te pāmahana teitei, ā, ka taea te mahi pumau i roto i te taiao tukanga PECVD uaua, e whakarite ana i te paninga kiriata ōrite ki runga i ngā papa silicon me te āwhina ki te whakapai ake i te whai huatanga o te tahuritanga me te pono mō te wā roa o ngā pūtau. He pai tēnei hua mō te whakatakotoranga o te silicon nitride (SiNx) me ētahi atu kiriata mahi i roto i ngā pūtau photovoltaic tino pai pēnei i ngā papa silicon monocrystalline/multicrystalline, TOPCon, me HJT, ā, he mea nui rawa atu i roto i ngā raina whakaputa papatipu pūtau photovoltaic.

Tawhā Hangarau

Rauemi: He mea hanga ki te karāpeti isostatic (parakore ≥ 99.99%), ka taea te tu atu i te pāmahana tiketike ohorere o te 1200°C me ngā huringa makariri me te wera pinepine i roto i te tukanga PECVD. Ko te tauwehenga whānui wera he iti iho i te 4.5×10⁻⁶/°C, e ārai ana i te pakaru me te whakarerekētanga. Kua roa ake te ora mahi mā te neke atu i te 30% ki te whakaritea ki ngā rauemi tuku iho.

Hoahoa Papa Wera Tino ōrite

Ko te kawe wera teitei o te karāpeti (100-120 W/m·K) me te hanganga hongere rere hau āhua honikoma ka taea te kawe wera tere me te ōrite i roto i te rūma tauhohenga. Ko te rerekētanga pāmahana i waenga i ngā papa silicon he ≤ ±2°C, ā, ko te matotoru o te kiriata ka eke ki te ±2.5% (te mea ārahi i te umanga).

Hangarau Maimoatanga Mata Iti te Parahanga

Ka pania te mata ki te paninga silicon carbide matotoru (SiC) mā te whakamahi rānei i tētahi tukanga oro tino maeneene (Ra ≤ 0.2μm), e ārai ana i te maringi o te paura graphite, ā, ka pupuri i te tere tukunga matūriki ki raro i te 5 matūriki/cm², e tutuki ai ngā whakaritenga horoi o ngā tukanga hanga pūtau photovoltaic kounga teitei.

Ārai-waikura me te Whakapūmau i te Ora Ratonga Roa

Ka taea te whiriwhiri i ngā paninga ārai-waikura hiato kua whakarōpūtia (pērā i te hanganga paparanga maha Al₂O₃/SiC), ka whakapai ake i te mahi ārai-waikura mā te 5 ngā wā i roto i ngā taiao kei roto te hāora i te pāmahana teitei. Neke atu i te 1500 huringa te roa o te ora, ka tino whakaiti i te utu whakaputa mō ia watt.

He aha i whiriwhiri ai i te Waka Graphite PECVD?

Urutaunga tukanga photovoltaic: Ngā otinga porosity me te whakarerekētanga mata kua whakaritea mō te wetewete karāhe silicon phosphor (PSG) TOPCon, te whakatakotoranga pāmahana iti HJT me ētahi atu whakaritenga motuhake.

Te whai huatanga o te utu: he painga utu taiao o ngā rauemi karāhe + he roa te ora ratonga, ka heke te utu whānui neke atu i te 40% ki te whakaritea ki ngā waka uku.

Manatoko me te pono o te ao: Ka whakamahia te hua i roto i te raina whakaputa photovoltaic neke atu i te 50GW o te ao, ko te reiti rahunga <0.1%.

Ngā pouaka poti Semixlab PECVD:

Te ōritetanga o te paninga: ±2.8% → ±2.1% (kua arotauhia 25%)

Auautanga o te whakakapinga o te anga: 800 ngā wā → 1300 ngā wā (62.5% toronga)

Pāmahana e tika ana: ≤800°C

Hototahi maramara silicon: 125mm×125mm ki te 210mm×210mm (tautoko whakaritenga)

Te roanga o te ratonga: ≥1000 ngā wā (i runga i ngā tikanga tukanga motuhake)

Te taratara o te mata: Ra≤0.5μm (kia iti ai te parahanga matūriki)

Taipitopito Tere:

1. Ētahi atu ingoa: Waka PECVD, waka karāpiti mō te Tukanga PECVD, Waka PECVD (Waka Kawe Whakatakoto Matū Whakarei Plasma).

2. Taupānga: ahumahi photovoltaic, e whakamahia ana i roto i te wāhanga whakatakotoranga kiriata angiangi o te hanga pūtau solar tino whai hua.

3. Ngā tawhā matua: Te parakore ≥99.995%, te mātotoru 1.80-1.85g/cm³.

Nga tauari tono angamaheni

Kiriata whakatakotoranga ā-whakaata pūtau PERC silicon nitride tioata kotahi.

Te whakarite i te paparanga waikura e keri ana i ngā pūtau TOPCon me te paparanga silicon polycrystalline.

Te tukanga whakatakoto kiriata silicon amorphous pūtau HJT.

Ātete Pāmahana-Teitei Tino Pai: Mā te whakamahi i te karāpeti parakore-teitei, i ngā rauemi hiato uku ritenga rānei, ka taea e ia te tu atu i te pāmahana tiketike tonu tae atu ki te 800°C i roto i te tukanga PECVD me te kore e rerekē te āhua, e poke rānei, kia mau tonu ai te pumau mō te wā roa.

Hoahoa Taurite Tika: Mā te hanganga mokowā kua arotauhia me te hangarau maimoatanga mata ka taurite te whakamahana o ngā anga silicon i te wā e whakatakoto ana, me te matotoru o te kiriata i roto i te ±3%, ka nui ake te pai o te pākahiko me te hua.

He iti te poke, he roa te ora ratonga: Mā te hangarau paninga mata motuhake ka ārai i te piri o ngā matūriki, ka whakaiti i te tūponotanga o te poke o te tukanga; mā te ātete kaha ki te waikura ka roa te ora ratonga neke atu i te 1000 huringa, ka whakaiti i te utu katoa a te kiritaki.

Hototahi me te Ngāwari: Ka tautoko i ngā rahi angiangi silicon (M6/M10/G12, me ētahi atu) me ngā whakaritenga tukanga rerekē, e tuku ana i ngā mokowā mokowā kua whakaritea me ngā hoahoa hanganga poti, ā, he hototahi ki ngā taputapu PECVD matua (pēnei i a Centrotherm, Meyer Burger, me ētahi atu).