Ka Rigid Graphite Felt

Kua hangaia te Semixlab Rigid Graphite Felt (RGF) hei wāhanga matua mō te whakamahana me te whakahaere wera i te pāmahana teitei mō te tipu o te Physical Vapor Transport (PVT) o ngā tioata SiC takitahi. I hangaia hei whakamahi i roto i te hanga papa 4H- me te 6H-SiC o te whakatupuranga e whai ake nei, ka whakakotahihia e tēnei papanga pakari te kawe wera tino iti, te hanganga teitei, me te parakore matū tino pai, ka waiho hei rauemi tūāpapa i roto i ngā oumu whakangawari SiC mahi teitei. Mā tana whakamahinga ka whakarite kia tika te whakahaere i ngā pikinga wera, ngā āhuatanga tipu pumau, me te kounga tioata kua whakarei ake puta noa i ngā huringa whakaputa roa.

I roto i te tukanga SiC PVT, ko te pupuri i tētahi papa wera ōrite me te ōrite te mea nui hei whakatutuki i ngā tioata takitahi kāore he hapa. Ko te Graphite Rigid Felt te mea matua hei whakamahana oumu, e karapoti ana i te ipu whakangawari me ngā hanganga papa wera. Ko tōna kawe wera iti ka whakaiti i te ngaronga wera kāore e hiahiatia, ka pupuri i te pikinga pāmahana ūnga i waenga i te pūtake SiC me te tioata purapura. Mā te whakahaere i ngā kōtaha pāmahana radial me te axial, ka whakaitihia e te RGF te hanganga o ngā nekehanga papa turanga, ngā hapa whakarārangi, me ngā paipa iti, ka pā tika ki te hanganga hanganga me te mahi hiko o ngā papa SiC ka puta.

Haunga ōna āheinga whakamahana, ko te hanganga pakari o te whatu karāpeti a Semixlab e whakarato ana i te pumau ā-mīhini i roto i ngā taiao pāmahana teitei neke atu i te 2000°C. Kāore i rite ki ngā whatu ngāwari, ngāwari rānei, ka mau tonu te āhua o te RGF i raro i te huringa wera roa, ka ārai i te hinga, i te whakarerekētanga rānei ka taea te whakararuraru i te papa wera, te whakararu rānei i te roanga o te oumu. Mā tōna koretake matū ka iti te tukunga matūriki, ā, ka karohia te poke o te pou SiC, he mea nui mō te whakaputa i ngā papa ātete-teitei mō ngā hikohiko mana me ngā tono taputapu whānui-rohe.

He mea hanga mā te whakamahi i te waro graphitic tino parakore me ngā tikanga whakakīkī matatau, ka whakaatuhia e te Semixlab Graphite Rigid Felt te kiato ōrite, te pumau āhua pai, me te roa o te wā. Nā te whakakotahitanga o te mahi wera me te pakari miihini ka taea e ngā papanga semiconductor te whakatutuki i ngā tere tipu ōrite, ngā kōtaha pāmahana ka taea te whakaputa anō, me te whakaiti i te wā kore mahi i roto i ngā pūnaha PVT. Mā te arotau i te pai o te wera o te oumu, ka whai wāhi hoki te RGF ki te penapena pūngao me te whakarei ake i te ōritetanga me te hua o te wafer.

Ka tukuna e te Rigid Graphite Felt a Semixlab te mahi, te parakore, me te pumau hanganga e hiahiatia ana hei tautoko i te tipu tioata kotahi SiC kounga teitei, e whakarato ana i ngā kaihanga ki tētahi otinga rauemi pakari mō te hanga wafer o te whakatupuranga e whai ake nei, te roa o te ora o te oumu, me te whakahaere wera pai rawa atu i roto i ngā taiao pāmahana tino tiketike.