Tube Umu SiC

Whakamaramatanga Hua me nga waahanga matua

Ko te ngongo oumu SiC he ipu ngongo pāmahana-teitei i hangaia mai i ngā uku silicon carbide parakore-teitei mā te tukanga sintering tauhohe (RBSC) me te tukanga whakatakotoranga kohu matū (CVD). He rerekē ki ngā rauemi whakarewa, ki ngā rauemi quartz rānei, ko te hanganga tioata ahurei o SiC ka hoatu ki a ia ngā āhuatanga ā-tinana me te matū e kore e taea te whakakapi, e āhei ai ki te pupuri i te pumau mahi pai i roto i ngā taiao tino kino.

Ngā āhuatanga ā-tinana matua o te hua:

● Te ātete ki te pāmahana tino teitei: Ka taea te mahi pumau mō te wā roa i runga ake i te 1600℃ i roto i te hau kore mahi, ā, ko te pāmahana haumaru mō te whakamahi i roto i te hau waikura ko te 1250-1300℃, he nui rawa atu i ngā rohe o ngā ngongo kuata (≤1100℃) me ngā koranu ātete wera (≤1150℃).

● Te kawe wera me te pumau wera:

Ko te kawe wera e eke ana ki te 100-200 W/m·K, neke atu i te 100 ngā wā i tērā o te karāhe kuata. Ka taea e ia te whakatutuki i te tohatoha wera ōrite i roto i te oumu (taurangi ≤±2℃), ka whakakore i te raruraru wāhi wera ā-rohe e kitea ana i roto i ngā ngongo oumu tuku iho.

Ko te tauwehenga whānui wera he 4.0×10⁻⁶/℃ (20-1000℃) anake, me te modulus tere teitei o te 350 GPa, hei whakarite i te pumau o te hanganga i roto i ngā huringa pāmahana nui.

● Te kaha ā-pūkaha me te ātete ki te kakahu: Te pakeketanga Mohs ≥9 (tuarua ki te taimana anake), te kaha piko 300 MPa, te kaha pēhi 2000 MPa, te ātete ki te horo o ngā matūriki me te ahotea ā-pūkaha.

● Te koretake o te matū: Ātete ki te waikura waikawa kaha pēnei i te HF me te HCl, ātete ki te whakairo plasma, he tino pai mō te taiao whakairo maroke semiconductor.

He aha i whiriwhiri ai koe i a Semixlab?

Ehara i te mea ka tutuki noa i ngā Ngongo Oumu Silicon Carbide ngā whakaritenga tino nui o te pāmahana teitei, te parakore teitei, te ātete ki te waikura, me ētahi atu i roto i te hanga semiconductor, engari ka riro hoki i a rātou te whakawhirinaki o ngā kiritaki mā te tautoko ritenga, te tuku tere me te ratonga muri-hoko kounga teitei.

Ahakoa he miihini taputapu hanga wafer koe, he kairangahau taiwhanga, he kaiwhakauru taputapu rānei, ka taea e mātou te whakarato i ngā otinga pono, pakari, me te ma mō tō tukanga maimoatanga wera kounga teitei. Nau mai ki te whakapiri mai ki a mātou hei tīmata i tō wheako hou ki te maimoatanga wera mahi teitei.

Te whakataurite i te mahi o ngā ngongo oumu SiC me ngā rauemi rerekē:

Ngā whakamahinga motuhake i roto i te tukatuka me te hanga i ngā haurua-haurua

He mea nui te mahi a te Ngongo Umu SiC i roto i te tukatuka me te hanga i te haurua-haurua, ā, ko tana tono e kapi ana i ngā hononga tukanga matua maha:

● Ōumu Horowha:

Mahi: Ko te oumu horapa te taputapu matua mō te tāpiringa, te waikura, te whakamahana me ētahi atu tukanga i roto i te hanga haurua-ira. Hei whakapuru matua o te oumu horapa, ka whakaratohia e te ngongo oumu SiC he rūma tauhohenga pumau, parakore, pāmahana teitei mō te wafer.

Ngā Painga: Mā te tino parakore me te ātete pāmahana teitei o te SiC ka whakaitihia ngā poke i te wā e horapa ana, ā, ka ārai i te poke o te wafer. Mā tōna pumau wera pai ka whakarite kia pumau te ngongo oumu i te wā e whakamahana ana, e whakamatao ana hoki, tae atu ki te pumau hanganga i raro i te mahi pāmahana teitei mō te wā roa, kia tutuki ai te kukū tāpiri tika me te tipu ōrite o te paparanga waikura. He mea nui tēnei mō te hanga i ngā transistors mahi-teitei me ngā ara iahiko whakauru.

● Taputapu PECVD (Te Whakapūtanga Matū Whakarei ake i te Plasma)/LPCVD (Te Whakapūtanga Matū Pēhanga Iti):

Mahi: I roto i ngā taputapu PECVD/LPCVD, ka whakamahia ngā ngongo oumu SiC hei rūma tauhohenga hei whakatakoto i ngā kiriata angiangi ki runga i te mata o ngā papa, pērā i te waikura silicon, te nitride silicon, me ētahi atu.

Ngā Painga: Mā te ātete ki te waikura o ngā ngongo oumu SiC ka taea e rātou te tu atu ki te mimiti o ngā hau tukatuka (pērā i te SiH4, NH3, N2O, me ētahi atu), ka whakarite i te pumau o te tukanga whakatakoto kiriata me te kounga o te paparanga kiriata. Mā tōna parakore teitei ka ārai hoki i te poke o te kiriata e te rauemi ngongo oumu, ka whakarite i ngā āhuatanga hiko me te whatu o te paparanga kiriata.

● Taputapu ALD (Whakatakotoranga Papanga Atomika):

Mahi: He hangarau te ALD e taea ai te whakatipu i ngā kiriata tino angiangi, ōrite hoki. Ka whakaratohia e ngā ngongo oumu SiC he taiao tauhohenga pumau, ngāwari hoki ki te horoi i roto i ngā taputapu ALD.

Ngā Painga: Kāore i te ngāwari te mimiti i ngā matū tauhohenga ki te mata SiC. Nā tōna mata maeneene me te tino parakore, ka pai ake te whakahaere i te tipu o te kiriata taumata-atomika, kia ōrite ai te matotoru o te kiriata, kia tere ai te whakahokinga.

● Ouma whakamahana pāmahana teitei:

Mahi: Ko te whakamahana pāmahana teitei he taahiraa matua ki te whakakore i ngā hapa o te wafer, te whakahohe i ngā dopants, me te whakapai ake i ngā āhuatanga o te rauemi.

Ngā Painga: Ka taea e ngā ngongo oumu SiC te whakarato i tētahi taiao pāmahana tino teitei, pumau, hei āwhina i ngā wafers ki te whakaoti i te whakatika whatunga me te whakahohe i te poke, me te whakapai ake i te mahi hiko me te pono o ngā taputapu. Ko tōna kaha miihini me te ātete ki te ru wera nui ka whakarite hoki kia noho ora ngā ngongo oumu i te pikinga me te hekenga o te pāmahana.

● Ētahi atu whakamahinga pāmahana teitei:

Ka whakamahia hoki te Ngongo Oumu SiC i roto i ngā oumu whakamātautau pāmahana teitei, ngā oumu whakawera rauemi motuhake, me ētahi atu i roto i ngā wāhanga R&D, e whakarato ana i tētahi taiao pāmahana teitei pono mō te whanaketanga o ngā rauemi semiconductor matatau.

Ngā āwangawanga me ngā otinga a ngā kaiwhakamahi

1: Te tiaki pinepine i ngā taputapu, me te ngawari o te pakaru o ngā ngongo quartz?

Otinga: Ka whakamahia e Semixlab ngā ​​ngongo uku silicon carbide kiato-teitei, he ātete pai ki ngā ru wera, ka taea te whakaiti i te auau o ngā mahi tiaki me ngā mōrearea o te wā kore mahi.

2: He teitei ngā whakaritenga mō te parakore o te hua, me pēhea te karo i te parahanga tuarua?

Otinga: Kōwhiria he paninga CVD SiC, he ngongo SSiC matotoru teitei-parakore rānei, he tino iti te tukunga paru whakarewa, kia tutuki ai ngā paerewa tukanga tino-ma.

3: He uaua ki te hoko i ngā rahi motuhake, i ngā hanganga atanga rānei?

Otinga: Ka tautoko mātou i te whakaritenga tuhi me te tukatuka hanganga hiato (pēnei i ngā atanga flange, ngā ngongo hikoi, ngā piko āhua-L, me ētahi atu) hei whakatutuki i ō hiahia whakaurunga pūnaha kanorau, matatini hoki.

4: Me pēhea te whakaoti i te wā tuku roa, me te kore taurangi i muri i te hoko?

Otinga: Hei kaihanga me te kaiwhakarato matua o ngā wāhanga SiC i Haina, kei a Semixlab ēnei painga whānui e whai ake nei: te kaha whakaputa pumau + te tirotiro kounga tino pakari + te takai kaweake + te tautoko hangarau, ka taea te whakamana i te wā tuku me te whakarato i te whakawhirinaki mahi tahi mo te wa roa.

Ngā toa hua Semixlab