EN 
EN
DA
NL
FI
FR
DE
IT
JA
KO
NO
PL
PT
RO
RU
ES
SV
TL
ID
SK
UK
VI
TH
TR
FA
BE
LA
UZ
Porous uku Korehau Chuck
Taipitopito Tere:
1. Ētahi atu ingoa: Pūwero korehau uku porous, Pūwero SiC porous, pūwero porous.
2. Whakamahinga: He taputapu mimiti korehau mahi-teitei i hangaia mō te mimiti me te whakapiri tika o ngā wafer me ngā ingots, he pai mō te hanga semiconductor, te tapahi wafer, te miihini tika, te epitaxy pāmahana teitei, te whakairo, te whakaurunga katote me ētahi atu āhuatanga.
3. Ngā tawhā matua:
Ka taea te whakarerekē i te pūngao (10-200μm).
Te pāmahana tino teitei (≤1600°C), te ātete tino pai ki ngā ru wera.
Te korehau mimiti: paerewa -90kPa (ka taea te whakarite ki te 100kPa).
Rahi kapu momi: Tautokohia ngā angaanga 4/6/8/12 inihi, ka taea te whakarite i te rahi o te ingota.
Whakaahuatanga
Ko te pūwero korehau uku he taputapu mimiti korehau mahi-teitei i hangaia mō te mimiti tika me te whakau i ngā papa me ngā poro. He hanganga whakakotahi o te mowhiti waho uku poro + konganuku, me te hoahoa ritenga o ngā awa me ngā pūwero hau kia tutuki ai te tohatoha kaha mimiti ōrite me te pumau teitei. He pai mō te hanga haurua-ira, te tapahi papa, te miihini tika me ētahi atu āhuatanga, e tautoko ana i te pāmahana teitei, te taiao nekehanga tere teitei, ka taea te whakatutuki i ngā whakaritenga hototahi o ngā rahi rerekē o ngā papa/poro.
Ratonga raupapa
Whakaritenga rahi me te kawenga
Te arotautanga o te stomata me te ara manawa
Te urutaunga taiao motuhake
Tauira hoahoa
tono
Hangahanga Semiconductor
Te tipu epitaxial: Te mimiti pumau o ngā anga SiC i ngā pāmahana teitei hei karo i te piko me te poke.
Te tuhi me te whakairo: Te tūnga tika i roto i te tūāpapa neke tere-nui (terenga ≤10G) hei whakarite i te tika o te whakarārangi whakairoiro.
Te tukatuka ingot
Te tapahi me te huri: Te mimiti i te konganuku tioata taumaha (pērā i te hapaira, te konganuku silicon carbide) hei pehi i te pakaru o te taha e puta mai ana i te wiri.
Rangahau pūtaiao me te hangarau motuhake
Te whakamahana pāmahana teitei: ka roa te mahi a ngā kapu momi silicon carbide porous i te 1600°C, me te kore e rerekē te āhua me te kore e puta he parahanga.
Paninga korehau: He hoahoa ātete hau teitei, he hototahi ki te taiao poka PVD/CVD.
Painga whakataetae
Ngā painga o te hanganga matua me ngā rauemi
1. Hoahoa hiato paparanga maha
Paparanga mata: Ukume pūwero (whiringa te karawiti silicon pūwero, te karawiti pūwero rānei), ka taea te whakarite i te whakatuwheratanga (10-200μm) kia rite ai te whakawhiti o te kaha mimiti ki te mata o te papa, kia kore ai e kukū te ahotea ā-rohe.
Matrix: Anga whakarewa pakari (kowiri tira, konumohe rānei) hei tautoko i te hanganga me te ātete i te hau.
Ara manawa me ngā pūwero: Mā te whatunga ā-roto o ngā ara manawa kua tino hangaia me ngā pūwero moroiti kua tohatohahia ōrite ka tautoko i te tangohanga tere o te korehau (te kaha mimiti tae atu ki te -90kPa) me te tukunga tonu.
2. Te whakataurite i ngā āhuatanga o ngā rauemi
| Rauemi | Karāhe silicon porowhita | Kauwhata poroporo |
| Te Whakatairanga i te Tao | Te pāmahana tino teitei (≤1600°C), te ātete pai ki te ru wera | Te pāmahana waenga-teitei (≤800°C), te kawe wera pai ake |
| Te roa o te matū | Ātete ki te waikura waikawa me te kawakore, ātete ki te waikura plasma | Ātete ki ngā hau kore-waikura, utu iti iho |
| Uru Tono Ka taea te tono | Te epitaxy pāmahana teitei, te whakairo, te whakaurunga katote | Te tapahi i te anga, te huri, te takai |
3. Ngā tawhā mahi matua me ngā tawhā hangarau
| Whakaahuatanga | parau |
| Rahi Chuck | Tautokohia ngā anga 4/6/8/12 inihi, ka taea te whakarite i te rahi o te ingot |
| Loading | Te kawenga mōrahi o te pereti kotahi 50kg (teitei ≤300mm) |
| Te mahi Temperature | Karāhe silicon porowhita: -50°C~1600°C; Karāhe porowhita: -50°C~800°C |
| Te korehau mimiti | Paerewa -90kPa (ka taea te whakarite ki te -100kPa) |
FAQ
P: Me pēhea te whiriwhiri i te karawiti silicon porous me te pūwero karawiti porous? He aha ngā rerekētanga matua i waenga i te karawiti silicon porous me te pūwero karawiti porous i roto i ngā tukanga pāmahana-tiketike? Me pēhea te whiriwhiri i te rauemi tika mō te horopaki tono?
A: Pūwero karāhe silicon porowhita:
Ātete pāmahana: ka taea te mahi pumau i ngā pāmahana tino tiketike ≤1600°C (pēnei i te epitaxy SiC, te whakamahana pāmahana teitei), he ātete ru wera tino pai, he pai mō te wāhi o ngā piki me ngā heke o te pāmahana.
Ātete ki te waikura: ātete ki te waikawa kaha, te kawakore me te waikura plasma, he pai mō te whakairo, te whakatō katote me ētahi atu tukanga hau waikura.
Te Pūwero Karāhe Porowhita:
Te kawe wera: Te kawe wera teitei ake (200-400 W/m·K), he pai mō ngā āhuatanga e hiahia ana kia tere te whakawhiti wera (pēnei i te tapahi wafer, te whakamarara wera).
Ōhanga: Utu iti, e tika ana mō ngā taiao pāmahana waenga ≤800°C (pēnei i te takai, te huri).
Nga whakaaro whiriwhiri:
Mena he nui ake i te 800°C te pāmahana o te tukanga, he ātete rānei ki te waikura, he pai ake te karāhe silicon porous; ki te hiahia koe ki te pāmahana tukanga iti me te utu-whai hua, ka taea e koe te whiriwhiri i te karāhe porous.
