Rauemi Papatipu CVD SiC Parakore Teitei
Kei a Semixlab ngā rauemi papatipu CVD SiC parakore-teitei i hangaia mō te tipu tioata kotahi PVT SiC, e whakarato ana i tētahi puna pono mō ngā rauemi mata. Ka hangaia ā mātou rauemi papatipu SiC mā te whakamahi i te hangarau matū matatau mō te whakatakoto kohu (CVD), e whakaatu ana i te ihirangi poke tino iti, te matotoru teitei, me te pumau wera pai rawa atu, e whakarite ana i te whanonga whakangawari pumau i roto i ngā tukanga kawe kohu tinana (PVT). Mā te whakahaere kounga pakari me te mahi puranga-ki-puranga rite tonu, ka āwhina a Semixlab i ngā kiritaki ki te whakatutuki i ngā tukanga tipu tioata SiC pono me te tauine. Kei te tumanako mātou ki tāu patai.
Whakaahuatanga
Ko te Rauemi Puranga CVD Totoka SiC Tino Parakore he rauemi silicon carbide polycrystalline tino parakore, tino matotoru, i hangaia mā te tukanga Chemical Vapor Deposition (CVD). He mea hanga motuhake mō te tipu o ngā tioata takitahi silicon carbide mā te whakamahi i te tikanga Physical Vapor Transport (PVT) ā, he rauemi pūtake o te whakatupuranga e whai ake nei hei whakakapi i te paura SiC tuku iho.
Ka hangaia tēnei hua mā te hangarua me te whakamahi anō i ngā wāhanga haurua-haurua CVD-SiC tino parakore kua whakakorea. Mā roto i ngā tukanga pēnei i te kuru, te whakarōpū, me te purenga, ka hurihia hei rauemi mata āhua poraka me ngā rahinga whakahaere. He painga matua kei roto ko te tino parakore, te korenga o te paru puehu waro, me te tere o te tipu.
He aha i whiriwhiri ai i te rauemi papatipu CVD-SiC hei rauemi pūtake PVT?
1. Te Aranga Hangarau
Kua whakaatuhia e ngā rangahau hou ko te whakamahi i te rauemi papatipu CVD-SiC kuru hei rauemi pūtake PVT ka taea te tipu tere o ngā tioata takitahi SiC i raro i ngā pikinga pāmahana poutū teitei (~3.8 °C/mm), ka eke ki te tere tipu o te 1.46 mm/h me te pupuri tonu i te kounga tioata pai rawa atu— —me te whānui katoa i te haurua mōrahi (FWHM) o te tihi (0004) i roto i te tauira diffraction hihi-X o te 18.9 arcsec anake.
2. Te Whakatika i ngā Take Tūturu me ngā Pūtake Paura Tuku Iho
He nui ngā matūriki angiangi o te paura SiC tuku iho e whakangawari ana i ngā pāmahana teitei, e tuku ana i ngā poke, e whakaputa ana i te "puehu-C" (ngā matūriki waro totoka). I ngā tere tipu teitei, ka taea e ēnei matūriki te kawe e te rere hau ki te mata tioata, ka puta he hapa whakaurunga. Kāore he matūriki angiangi o te Rauemi Puranga CVD-SiC, ā, koia te whakatau i tēnei raruraru.
3. Te Hangarua Rauemi
Ko te rauemi papatipu CVD-SiC i ahu mai i ngā wāhanga CVD-SiC tino parakore (pērā i ngā poti karāpiti me ngā whakamahana) e whakamahia ana i roto i ngā tukanga haurua-ira. I muri i te kohikohinga me te kuru, ka whakamahia anōtia ēnei rauemi, kia tino parakore ai, kia taea ai hoki te whakamahi tonu i ngā rauemi.
Ratonga Whakaritenga
Ka taea e mātou te whakarato i ngā ratonga e whai ake nei i runga i ngā hiahia motuhake o ngā tukanga tipu PVT a ō mātou kiritaki:
| Kōwhiringa Whakaritenga | Awhe Whakatakotoranga |
| Rahi Poraka | 5 mm – 50 mm (ka taea te whakanekeneke i runga i te tono) |
| Koeke Purity | 7N (99.99999%) |
| Momo Doping | Te ātete teitei / Te ātete iti (te tāpiritanga momo-N) |
| Packaging | Tākai rūma ma, kōwhiringa Akomanga 100/1000 |
Whakatakotoranga
Tawhā Hangarau
| tawhā | Te Uara Tino |
| kiato | 3.21 g/cm³ (Kōmato Ariā) |
| viivii | ≥ 99.99999% (7N) mā te GDMS |
| Kaha Whakapiko (Pamahana Rūma) | 372–539 MPa |
| Kaha Whakapiko (1300°C) | 558 MPa |
| Te Whakaoho Tema | 220–280 W/(m`K) |
| Tuhinga o te Whakawhānui Ngawha | 4.5 × 10⁻⁶ /K (RT–1000°C) |
| Tuhinga | 0.1 – 1.0 Ω`cm (Ka taea te whakarite) |
| Maamaa (Vickers) | 2800 HV |
| Rahi Poraka Toharite | 5–50 mm (Ka taea te whakarite) |
Te Ihirangi Parakore Noa (Tātari GDMS)
| huānga | Ihirangi (ppb) |
| Na | <2 |
| Fe | <35 |
| Cr | <26 |
| Co | <1.3 |
| Cu | <50 |
| Zn | <9 |
tono
Scenario Tono
Te Whakamahinga Matua: Rauemi pūtake mō ngā tioata takitahi SiC i whakatipuria ki te PVT
Kua hangaia tēnei hua mō te tikanga kawe kohu ā-tinana (PVT) o te whakatipu i ngā papa tioata kotahi 4H-SiC me te 6H-SiC, hei rauemi whakakapi mō ngā pūtake silicon me te waro parakore-teitei.
Te Mātāpono Tukanga:
1. I te pāmahana teitei (2100–2500°C) me te pēhanga iti (~4 kPa), ka whakapūmau te rauemi papatipu CVD-SiC hei whakaputa i ngā momo hau pērā i te Si, SiC₂, me te Si₂C.
2. Nā te pikinga o te pāmahana, ka haria ēnei momo hau ki te mata tioata purapura.
3. Mā te whakakōhatu anō i runga i te tioata purapura ka hangaia he tioata takitahi SiC kounga teitei.
| Tuemi Whakataurite | Paura SiC Tuku Iho | Rauemi Papatipu CVD-SiC |
| Rahi matahi | 5-50 mm | nuinga |
| Take Puehu Waro | He ngāwari ki te whakaputa puehu C, ka arahi ki ngā whakaurunga | Kāore he matūriki angiangi, kāore he puehu C |
| Tohatohatanga o te poke | Te kukū teitei o te poke i roto i ngā matūriki iti | He ōrite, he tino iti ngā taumata poke |
| Taumare Tatauranga | 0.3–0.8 mm/h | Tae atu ki te 1.46 mm/h |
| Rōnaki Pāmahana | Iti Iti | He nui ake, he tere ake te tipu |
Painga whakataetae
| āhuatanga | Whakaahuatanga |
| Te Parakore Tino-tiketike | Te parakore tae atu ki te 99.99999% (7N), he tino iti te ihirangi paru whakarewa (taumata ppb) |
| Kore Parahanga Puehu Waro | Kāore he matūriki angiangi o te āhua papatipu, ā, ka karohia ngā hapa tioata i puta mai i te "puehu C" i hangaia i ngā pāmahana teitei i roto i ngā pūtake paura tuku iho. |
| Te Tere Tipu Teitei | Mā te whakamahi i ngā pūtake papatipu CVD-SiC, ka taea te whakatutuki i te tere tipu tioata kotahi SiC tae atu ki te 1.46 mm/h, he nui ake i te 0.3–0.8 mm/h o ngā pūtake paura tuku iho. |
| Kounga Kiriata Pai | Ahakoa te tere tipu, ka mau tonu te iti o te kiato o ngā ngongo moroiti me te iti o te kiato o te nekenekehanga (~3000 cm⁻²), he rite tonu te kounga o te tioata ki ngā angaanga arumoni. |
| Te Āheitanga ki te Whakarerekētanga o te Rōnaki Pāmahana Nui | Ka nui ake te pikinga o te pāmahana i roto i te papa wera i te āhua papatipu, he mea pai mō te whakawhiti papatipu tere me te tipu pumau. |
| Te Whakataetae Utu | Mā te hangarua i ngā wāhanga CVD-SiC parakore-teitei kua panga atu i roto i ngā tukanga haurua-ā-ira ka taea te whakamahi anō i ngā rauemi, ā, ka hua ake he painga utu nui. |
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