Ngongo tohatoha quartz parakore teitei

He mea hanga motuhake te Ngongo Whakarara Quartz Parakore Teitei o Semixlab mō ngā tukanga wera pāmahana-tiketike i roto i te hanga haurua-ā-ira, tae atu ki te waikura, te horapa ira-whakauru, me te whakamahana.

He mea hanga mai i te silica whakarewa tino parakore (≥99.99% SiO₂), kua hangaia ia ngongo hei whakarato i te pumau matū tino pai, te iti o te poke, me te ōritetanga wera tika—kia whakarite ai i ngā hua tukatuka wafer rite tonu i roto i ngā taiao rūma ma e hiahiatia ana.

Ahakoa kua whakauruhia ki roto i ngā oumu horapa poutū, whakapae rānei, he tino tika te hanganga o ngā ngongo kuata a Semixlab, ā, kua whakamatautauria kia tutuki ai ngā whakaritenga pakari o te hanga IC, LED, MEMS, me ngā taputapu hiko.

Nga tono i roto i nga Tukatuka Semiconductor

1. Te Waiora

I roto i ngā oumu whakahāwea wera, ka mahi ngā ngongo tohatoha kuata hei rūma tauhohenga tuatahi e whakaatuhia ai ngā papa silicon ki te kohu O₂, H₂O rānei i ngā pāmahana teitei (900–1150°C).

● Ka whakarato i tētahi taiao hāora ma, pumau hoki mō te tipu ōrite o te SiO₂.

● Ka whakakore i te poke o te katote whakarewa, ka whakarite kia teitei te kounga o te dielectric mō ngā waikura kuaha me te wehe.

He pai rawa te ngongo tohatoha quartz parakore mō te tukatuka wafer

2. Te horapa o te tāpiringa

Ka whakamahia ngā ngongo tohatoha quartz hei tohatoha i ngā ngota tāpiri (pērā i te phosphorus, te boron rānei) ki roto i te papa silicon hei hanga i ngā kōtaha hononga e hiahiatia ana.

● He tino pai te koretake o ngā matū hei ārai i te poke i te wā o ngā tauhohenga POCl₃, BBr₃ rānei.

● Ka mau tonu te parakore teitei ahakoa i roto i ngā āhuarangi halogen.

3. Ngā Tukanga Whakamahana me te Puku-ki-roto

I muri i te whakaurunga, te whakatakotoranga rānei o te katote, ka whakamahanahia ngā papa i te pāmahana teitei hei whakahohe i ngā tāpiringa me te whakatika i ngā kino o te whatunga.

● Ka whakaratohia e ngā ngongo kuata he rūma pāmahana ōrite, he iti te poke, kia pumau ai, kia taea ai te whakaputa anō i ngā hua.

● He pai mō ngā taiao whakamahana N₂ me te hanga hau.

4. Te Tukatuka Wera o te LPCVD me te R&D

I roto i ngā oumu LPCVD iti, i ngā oumu rangahau rānei, ka taea e ngā ngongo tohatoha kuata te mahi hei rūma tauhohenga me te rūma pupuri.

● He pai mō te whakatakoto i te polysilicon, te silicon nitride, me ngā kiriata waikura.

● Ka whakarite kia iti te hanganga o ngā matūriki, kia nui hoki te auautanga puta noa i ngā oma.

Ngā Painga o Semixlab

1. Te Parakore o ngā Rauemi me te Aroturukitanga

He mea hanga ia ngongo kuata mai i te silica parakore rawa i ahu mai i ngā kaiwhakarato whaimana. Kei te wātea ngā pūrongo tātari ICP-MS ina tonoa, hei whakamana i te whai i ia puranga.

2. Te Hanga me te Whakaritenga Tika

Ka tukuna e Semixlab ngā ​​hoahoa ritenga kia tutuki ai ngā rahi oumu, ngā kōtaha wera, me ngā tauira rere hau e hiahiatia ana e ngā kiritaki.

Ko nga kōwhiringa ko:

● Ngā whirihoranga ngongo poutū, whakapae rānei

● Ngā diameter kua whakaritea, ngā matotoru o te pakitara, me ngā pito o ngā pito

● Ngā whakaotinga mata kua orohia, kua whakairohia rānei

● Ngā hoahoa whakahaere motuhake mō ngā kaikawe angiangi maha

3. Whakamātautau Pūmau me te Whakapūmau Kounga

Ka tirotirohia ia ngongo horapa i ngā āhuatanga, ka whakamātautau i te āhua o te mata, ka whaiwhakaarohia hoki te ahotea wera i mua i te tukunga. Mā tēnei ka taea te whakarite kia hototahi ki ngā pūnaha oumu horapa matua o te ahumahi pērā i a TEL, Kokusai, Centrotherm, me ASM.