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SiC Ceramics
Kōpae Ukume Porowhita Silicon Carbide Sic
Kōpae Ukume Porowhita Silicon Carbide Sic

Kōpae Ukume Porowhita Silicon Carbide Sic


Ko te Kōpae Uku Porous Silicon Carbide (SiC) mai i Semixlab he mea hanga mō ngā tono tukatuka wafer semiconductor mahi-teitei e hiahia ana ki te tika, te parakore, me te pakari. Me te moroiti-porous whakahaeretia, te kawe wera pai rawa atu, me te koretake matū, ka whai wāhi nui tēnei wāhanga ki te maka korehau, te CMP (Chemical Mechanical Polishing), te epitaxy, me ngā pūnaha whakahaere wafer.

Whakaahuatanga

He mea tino pai mō: Ngā tūāpapa CMP, ngā tauhohenga epitaxy MOCVD, ngā kōwae whakawhiti wafer, ngā pūnaha horoi plasma, me ngā huihuinga papa ESC.

Ⅰ. Te Hanganga o ngā Rauemi me ngā Āhuatanga ā-Tinana

Hanganga Ukume SiC Parakore-Teitei

He mea hanga mai i ngā paura α-SiC, β-SiC rānei tino parakore ≥99.9%, ka hangaia ia kōpae pūwero mā roto i ngā tukanga sintering me te whakaurunga e whakahaeretia ana e te tino tika. Ko te hua he whatunga pūwero ōrite e whakarite ana i te rere o te hau me te pono o te miihini i raro i ngā taiao tukatuka tino kino.

Ngā Āhuatanga Hangarau Matua:

Āhuatanga Whakapūtātanga
Rauemi α-SiC / β-SiC
viivii ≥99.9%
Porotoru 10–40% (ka taea te whakarerekē)
Rahi Pore 0.1–10μm
Te Whakaoho Tema 120–200 W/m·K
Max Mahi Temp 1600-1800 ° C
pakeke Mohs 9.3
Te Whawhai Whakamutunga Tino pai i roto i te HF, HCl, Cl₂, H₂
kiato 2.8–3.1 g/cm³

Nga Tohu Mahinga:

● Te Āheinga Korehau Kotahi: Mā te tohatoha tika o ngā pūwero ka taurite te rere o te hau puta noa i te mata o te papa.

● Te Pūmautanga Wera Tino Pai: Ka mau tonu te pumau o te miihini i raro i te huringa pāmahana teitei.

● He iti te whakaputa matūriki: Ka whakaitihia e ngā mata SiC kua orohia te mōrearea o te poke.

● Te Pakari Pai Rawa: Ka roa ake te ora o te ratonga ahakoa i roto i ngā taiao matū me te plasma kaha.

II. Ngā Wero Tukanga Noa me ngā Otinga Semixlab

wero Take Take Ngā Otinga Semixlab
Momi Korekore Taurite Te rahi o ngā pore kāore i te ōrite, te ārai rānei Te tohatoha rahi o ngā pore me te horoi plasma ā-wā
Te Parahanga o te Matūriki Ngā kapiti iti mai i te huringa wera Tāpirihia he paninga CVD SiC hei whakapakari i te mata
Te Kore-Whakaōritenga Wera Te matotoru kore taurite, te poke rānei Whakamahia te SiC kawe-teitei (>150 W/m`K) me ngā mata kua orohia
Horohanga matū Te roa o te pānga ki ngā hau HF, ki ngā hau Cl rānei Whakamahia te sintering ranu CVD SiC matotoru hei whakarei ake i te ātete ki te waikura
Te Whakaiti i te Kaha Mīhini i te Wā Te ahotea utaina o te wafer e toe ana Te urunga tuarua hei whakapai ake i te pakari o te whati me te whakaroa i te roa o te ratonga

Mā te mana whakahaere rauemi me te hangarau mata motuhake a Semixlab ka mau tonu te mahi, ka pono te mahi mō te wā roa, ka whakaitihia te wā kore mahi o ngā taputapu puta noa i ngā huringa tukanga maha. Nau mai ki te kōrero mai ki a mātou mō ētahi atu kōrero hangarau me ngā ratonga whakaritenga hua.

tono

Nga tono i roto i nga Tukatuka Semiconductor

1. Te Tango me te Whakahaere i te Korehau Wafer

E whakamahia whānuitia ana ngā kōpae SiC pūwero hei pereti pūwero korehau, hei tautoko kawe rānei i roto i ngā pūnaha uta me te whakawhiti wafer. Nā te pūwero i hangaia kia tika te hanga, ka taea te momi korehau ōrite, ka whakakore i te whakarerekētanga o te wafer, ka whakapai ake i te tika o te whakarārangi.

2. Te Whakakanapa Matū Ā-Mīhini (CMP)

I te wā o te CMP, ka mahi te kōpae SiC porous hei kawe, hei pereti tautoko rānei, e āhei ai:

● Te tohatoha ōrite o te paru

● Tautoko angiangi pumau

● Whakapai ake i te papatahi me te whakahaere hapa

Ki te whakatauritea ki te alumina tikanga, ki te quartz rānei, he nui ake te mārō me te kawe wera o te SiC, e roa ake ai te ora me te pai ake o te hanganga tukanga.

3. Te Epitaxy me te Tukatuka Mahana-Tiketike

I roto i ngā tauhohenga epitaxial MOCVD me LPE, ka mahi te kōpae porous SiC hei turanga ārai wera, hei tūāpapa tautoko rānei, kia mōhio ai:

● Te whakawhiti wera ōrite puta noa i te papa

● Te matotoru o te paparanga epitaxial pumau

● Te ātete nui ki ngā hau tukatuka tauhohe

4. Ngā Pūnaha Horoi Makuku me te Plasma

Nā tōna ātete ki te waikura matū me te waikura plasma, ka whai hua te mahi a te kōpae SiC porous hei pereti tohatoha hau, hei papa tātari matū rānei i roto i ngā paepae maku me ngā rūma horoi.

5. Paparanga Tūāpapa ESC (Electrostatic Chuck)

I ngā wāhanga wafer matatau, ka mahi ngā uku SiC porous hei turanga wera mō ngā ESC, e whakakotahi ana i te whakawhiti wera pai me te whakamarumaru hiko mō te whakahaere tika i te pāmahana wafer.

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