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Para Whakakotahi Waro Waro
Ko te Carbon Carbon Composite Crucible (C/C Crucible) mai i Semixlab he mea hanga mō ngā taiao tino uaua i roto i te tipu tioata semiconductor me te tukatuka epitaxial. Kua hangaia te Carbon Carbon Composite Crucible a Semixlab mā te whakamahi i ngā muka waro modulus teitei me ngā matrices waro parakore teitei, e tutuki ai he kōtaha mahi kua whakaritea mō te tipu silicon CZ, te epitaxy silicon, me te tipu sublimation SiC PVT. Ahakoa mō ngā kaihanga wafer silicon e whakanui ana i te ōritetanga ingot, mō ngā kaihanga epitaxy e arotau ana i te ōritetanga whakatakotoranga, mō ngā kaihanga SiC rānei e whakarahi ana ki ngā boule nui ake te diameter, ka whakaratohia e te Carbon Carbon Composite Crucible he turanga pakari, iti-paru mō te hanga semiconductor hou.
Whakaahuatanga
I roto i te tipu o te tioata silicon (tukanga Czochralski), ka whakamahia te oko C/C hei tautoko hanganga me te huānga whakaū wera e karapoti ana i te oko o roto kua hanumi-silica. Ko tōna iti o te horapa wera, te kaha miihini teitei, me te ātete pai ki te ru wera ka āwhina i te pupuri i te āhua o te oko i roto i ngā huringa kume roa, ka whakaiti i te whakarerekētanga o te kuata me te āhei i ngā pikinga pāmahana ōrite. Ka whai wāhi tika tēnei ki te whakahaere nekehanga pai ake, te roa ake o te ora o te oko kuata ka taea te whakamahi, me te whakarei ake i te ōritetanga o te ingot silicon monocrystalline ka puta.
I roto i ngā pūnaha epitaxy silicon me SiC, ka mahi te Waro Waro Composite Crucible hei kaikawe pāmahana teitei pumau me te wāhanga whakahaere wera, e tautoko ana i ngā whakapūmau me ngā hanganga pupuri wafer. Ko te kaha o te composite ki te pupuri i te pakari me te koretake matū i roto i te hauwai, te chlorinated, te taiao korehau-teitei rānei he mea nui hei whakaiti i te poke me te whakatutuki i te mahi wera e taea te matapae. Ko te hua he matotoru ake te paparanga epitaxial, he kounga mata teitei ake, he pai ake te wā mahi o te tauhohenga.
Mō te tipu o te SiC monocrystal mā te whakamahi i te Physical Vapor Transport (PVT), ka noho te oko C/C hei wāhanga matua o te rūma whakapūmau. Mā te kaha pāmahana teitei whakamiharo o ngā hiato waro-waro—neke atu i te 2200°C i roto i ngā āhuarangi kore mahi—ka taea e te oko te tu atu i ngā huringa whakapūmau roa me te pupuri tonu i tētahi mara wera pumau e tika ana mō te whakaiti i ngā hapa i roto i ngā boule SiC. Ko tōna iti o te poke me te iti o te whakaputanga matūriki ka whakaiti i te mōrearea o te tāpiritanga kore whakaaro me te horapa micropipe, e tautoko ana i te whakaputanga o ngā tioata SiC 4H me te 6H kounga teitei e whakamahia ana i roto i ngā hikohiko mana matatau.
I hangaia mō ngā rauemi haurua-ā-ira o te whakatupuranga e whai ake nei, ka taea e te ipu para Semixlab C/C te whakaputa hua nui ake, te roa o te oranga taputapu, me te kounga tioata pai rawa atu puta noa i ngā papaaho hanga maha. Ko te ipu para waro waro a Semixlab he mea hanga me te mana whakahaere tukanga tino pakari, tae atu ki te kōwhiringa mua parakore-teitei, te whakakīkī maha-taahiraa, me ngā maimoatanga mata motuhake. Ko te hua he ipu para me te pumau āhua pai rawa atu, te ātete waikura kua whakarei ake, me te tino whakaiti i te tukunga matūriki ki te whakataurite ki ngā momo karāhe paerewa. Ka tirotirohia ia hua me te whakamana wera-mīhini kia rite ai te mahi i roto i ngā kaikopere CZ ahumahi, ngā tauhohenga epitaxy poutū/whakapae, me ngā oumu SiC PVT.
to tatou Ratonga
Toa Hua Semixlab
