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SiC whakawera kauwhata whakakikoruatia mo MOCVD
Ko te Semixlab SiC Coated Graphite MOCVD He kawe wera mahi-teitei i hangaia mō ngā tukanga hanga semiconductor e whakamahi ana i te matū kohu matū (CVD) hei hanga i tētahi paninga silicon carbide (SiC) ōrite, matotoru ki runga i te mata o tētahi papa graphite tino parakore.
Whakaahuatanga
Products Taipitopito
Ka whakakotahi te Whakamahana MOCVD Kua Pania ki te Graphite SiC i te kawe wera pai rawa atu o te graphite me te ātete pāmahana teitei me te waikura o ngā paninga SiC, ā, e whakamahia whānuitia ana i roto i ngā taputapu MOCVD hei whakarite i te pumau me te parakore teitei i roto i ngā tukanga tipu epitaxy wafer.
Ngā Āhuatanga Hua o te Whakamahana MOCVD Kua Pania ki te Graphite SiC
1. Te tino parakore me te pumau matū
Parakore ≥99.99995%: Ka whakaritea tā mātou Whakamahana Graphite i raro i te whakapūkara pāmahana teitei mā te tukanga CVD, e ārai pai ana i te poke o te konganuku, ā, ka tutuki hoki te hiahia mō ngā taiao tino ma i roto i te hanga haurua-ira.
Ārai i te waikura matū: Ka taea e te paninga SiC matotoru me te pakeke teitei (te pakeke o Vickers o te 2500-2800) te ātete ki te waikura o ngā waikawa, ngā kawakore, ngā tote me ngā whakarewa waro, ka roa ake te ora o te taputapu i roto i te taiao hau waikura.
2. He pai te parenga pāmahana teitei
Te pumau o te pāmahana: ka taea te tu atu ki te 3000°C i roto i te hau kore mahi, te mahi pumau tae atu ki te 2200°C i roto i te taiao korehau, me te 1600-1700°C i roto i te taiao waikura, he mea e tika ana mō ngā āhuatanga tino kino o te rūma tauhohenga MOCVD.
Tauwehenga Iti o te Whakawhanuitanga Wera (4.5 x 10-⁶K-¹): Mā tēnei āhuatanga o te Whakamahana Karāhe MOCVD ka whakaiti i te ngatata, te tihore rānei o te paninga nā ngā huringa pāmahana, ka whakarite i te pumau o te hanganga i raro i te huringa wera mō te wā roa.
3. Te whakapai ake i te mahi whakahaere wera
Te Awenga Wera Teitei (200-300 W/mK): Mā te kawenga wera teitei o te Whakamahana MOCVD Graphite ka taea e te hua te whakawhiti wera tere me te ōrite kia tutuki ai te tohatoha pāmahana mata wafer rite tonu (±1°C), ā, ka pai ake te ōrite o te paparanga epitaxial.
Hoahoa Papa Rere Hau Laminar: Whai muri i te whakahoutanga me te whakapai ake tonu i te hangarau, mā te maeneene o te mata o te Whakamahana MOCVD (Ra ≤ 0.8μm) me te arotau i te āhuahanga ka whakarite kia rite te tohatoha o ngā hau tauhohe, ā, ka whakaitihia te kore-taurite o te whakatakotoranga i puta mai i te aueue.
Whakatakotoranga
Te Whakataurite i ngā Tawhā Hangarau me ngā Painga
| āhuatanga | Ngā whakamahana pania SiC a Semixlab | Ngā whakamahana graphite tuku iho |
| Te pāmahana whakahaere mōrahi (kore mahi) | 3000 ° C | 2500 ° C |
| Te maamaa matū | ≥99.99995% | ≤99.99 |
| Te whanaketanga tema | 300W/mK | 120-150 W/mK |
| Te whakahuihui i te noho | 415 MPa (piko 4-ira) | 100-200 MPa |
| Te oranga noa (ngā huringa) | > 500 huringa | 100-200 huringa |
Painga whakataetae
He aha i whiriwhiria ai a Semixlab?
Whakaritenga: E whai ana a Semixlab ki te whakarato hua me ngā ratonga hangarau kua whakaritea ki ā mātou kiritaki. E tautoko ana mātou i te whakaritenga o ngā rahi kāore i te paerewa (tae atu ki te 360mm te whānui) me ngā matotoru paninga (20-500μm) hei whakatutuki i te whānuitanga o ngā hiahia taputapu.
Tiwhikete Ao: Ko tā mātou Whakamahana Karāwhite Paninga SiC he mea tutuki i ngā whakaritenga SEMI, he mea whaimana ISO 9001, ā, ko te nuinga o ā mātou hua ka kaweake ki Ūropi me te Hononga o Amerika, tae atu ki Hapani me Kōrea ki te Tonga, me te painga nui ki te utu/mahi.
Te mahi tahi hangarau: Kua roa a Semixlab e mahi tahi ana me ngā umanga rangahau matua o Haina, mā te whakamahi i ngā hangarau paninga kua patenttia (pērā i te tukanga SiC³ a CGT Carbon) hei arotau i te matotoru o te paninga me te ātete ki ngā ru wera.
