Te paninga CVD Silicon Carbide (SiC).

Ko te paninga CVD SiC he paparanga silicon carbide kua whakatakotoria ki runga i te graphite, ā, he whānuitia te whakamahinga i roto i ngā taputapu epitaxy ina he mea nui te pāmahana me te ma. I roto i ngā raina whakaputa tūturu, ka kitea pinepine koe i roto i ngā pūnaha mai i AIXTRON, ASM/LPE, Veeco, me ētahi tūāpapa e pā ana ki te AMAT. Ko te mea e whai hua ai ehara i te mea ko te ātete pāmahana anake, engari ko te pumau whānui i roto i ngā oma roa. I raro i ngā āhuatanga epitaxy noa - te hauwai, te haukini, tae noa ki ngā hau chlorine - ka noho pumau te paninga, ā, ka tiaki i te graphite i raro. Ka āwhina tēnei ki te pupuri i te papa wera kia ōrite ake, ā, ka whakaiti i te tūponotanga o te puta mai o ngā matūriki i te wā e tipu ana.

I te nuinga o te wā, ka pania te paninga ki ngā wāhanga pēnei i ngā whakapūmau, ngā kaikawe wafer, ngā mowhiti karāhe, ngā wāhanga marama-haurua rānei. Ka whai wāhi tika ēnei katoa ki te whakamahana, ki te whakanoho rānei i ngā wafer, nō reira, ka pā te kore pumau iti ki te hua. Nā reira, he maha ngā wā ka kiia ngā wāhanga pania he mea pau e hiahia tonu ana kia pono i roto i ngā huringa maha, inā koa i roto i te hanga 4 ki te 12 inihi.