Kaikawe SiC Totoka

Ka whakamahia e te Kaikawe SiC Totoka a Semixlab te SiC tioata kotahi parakore teitei hei papa, ā, ka hangaia he paparanga tiaki hiato SiC-C nano-tauine i runga i te mata mā te tukanga paninga patent, e hanga hou ana i te rohe mahi o te rauemi kawe i te taumata ngota. Ko tōna mahi tino pai i ahu mai i te hanganga tioata ahurei o te SiC me ngā āhuatanga here hononga.

Ngā āhuatanga āhuatanga

● Tino teitei te pumau o te wera me te ātete ki te pāmahana: He tino pai te pumau o te SiC i ngā pāmahana teitei, ā, ka taea te mahi pumau i roto i te taiao waikura tae atu ki te 1600°C, ā, ka taea e tōna pāmahana whakangawari te eke ki te 2700°C. Nā tēnei ka waiho ngā kaikawe SiC hei whiringa pai mō te tipu epitaxial pāmahana teitei, te whakamahana me ētahi atu tukanga, he nui atu i te manawanui o ngā rauemi tuku iho.

● He kawe wera tino pai: Ko te kawe wera o te SiC i te pāmahana rūma he teitei ki te 120 W/m·K, arā, e 3 ngā wā i te silicon (Si). Mā te kawe wera teitei ka taea e te anga i runga i te kawe te whiwhi i te tohatoha pāmahana ōrite i roto i ngā tukanga pāmahana teitei, kia rite ai te kounga tipu o te paparanga epitaxial me te whakaiti i te piko me te ahotea.

● He tino kaha te miihini me te pakeke: He tino teitei te pakeke o te SiC (te pakeke o Mohs 9.0-9.5, te pakeke o Vickers 32 GPa), tuarua ki te taimana, me te modulus Young teitei (440 GPa) me te kaha piko teitei (490 MPa). Nā tēnei ka tino ātete te kawe SiC ki te kakahu me te whakarerekētanga i te wā o te pānga miihini me te whakahaere kaha, ka roa ake ai tōna ora mahi.

He aha i whiriwhiri ai koe i te Kaikawe SiC Totoka a Semixlab?

● Ngā āheinga R&D me te whakaputa: E rua ngā pokapū R&D a Semixlab, e rua ngā turanga whakaputa, e 12 ngā raina whakaputa, neke atu i te 150 ngā kaimahi, ā, neke atu i te 30% te haumitanga R&D. Ka taea e ia te whakaputa i ngā tekau mano o ngā hua SiC ia tau.

● Ngā painga hangarau: Te whakawhanake motuhake i ngā taputapu me ngā tātai CVD, te tautoko i te CVDSiC parakore teitei, te TaC me ētahi atu paninga me ngā rauemi SiC totoka, ka taea e te whakahaere tika CNC te eke ki te 3μm, he iti iho i te 5ppm te ihirangi pungarehu, ā, he tino pai te mahi a te hua i roto i te umanga.

● Pūnaha tuku katoa: Kei a Semixlab tētahi raina hanga rauemi silicon carbide motuhake me te tūāpapa tukatuka CNC tino tika, e taea ai te whakarato i ngā rahi Ø4" ~ Ø12" me ngā rahi kua whakaritea, e tautoko ana i te tuku tere, me te urutau ki ngā waitohu taputapu matua pēnei i a Veeco, AIXTRON, me Applied Materials.

● Whakaritenga me te ratonga kotahi-mutu: E ai ki ngā hiahia o te kiritaki, ka taea e mātou te whakarato ratonga tukatuka-katoa mai i te kōwhiringa rauemi, te R&D, te whakamātautau ki te whakaputa papatipu hei whakatutuki i ngā hiahia hanga haurua-whakamua.

● Mākete o te ao me te turanga kiritaki: Kua whakatūria e Semixlab he mahi tahi roa me te neke atu i te 30 ngā kiritaki hanga wafer me ngā kiritaki semiconductor matū i te kāinga me tāwāhi, tae atu ki ngā kaihanga Mini LED, taputapu hiko SiC, MEMS, me ngā taputapu RF.

Kua noho te kawe SiC totoka hei mea nui hei pau i roto i ngā mara o te epitaxy semiconductor, te takai, ngā taputapu hiko, me ētahi atu nā ōna āhuatanga rauemi me te mahi tukatuka tino pai. He hoa pono a Semixlab e whakarato ana i ngā otinga kawe SiC kounga teitei me te whai hua ki ngā kiritaki o te ao me ōna kaha R&D, hanga me te whakaritenga kaha.

Ngā whakamahinga motuhake i roto i te hanga haurua-haurua

Nā te mahi tino pai o te Kaikawe SiC Totoka, he mea nui tēnei mahi i roto i ngā momo tukanga hanga matua o te haurua-haurua, he mea tino pai mō ngā hononga he tino teitei ngā whakaritenga mō te pāmahana, te parakore, te ōritetanga me te pumau ā-mīhini. Ko ngā āhuatanga tono noa e whai ake nei:

1. Te epitaksi

Te epitaxy MOCVD: Ko te kawe SiC te wāhanga matua o te tipu o GaN, GaAs, SiC me ētahi atu kiriata haurua-haurua matū i roto i ngā taputapu MOCVD, pērā i te kawe i te pūwero me te kawe i te pancake susceptor. Ko tōna kawe wera teitei ka whakarite i te ōritetanga o te pāmahana i roto i te rūma tauhohenga, he mea nui ki te ōritetanga o te matotoru o te kiriata, te hanganga me te tāpiri; ko tōna parakore teitei me te koretake o te matū ka ārai i te poke o te poke me te whakarite i ngā āhuatanga hiko me te whatu o te paparanga epitaxial, inā koa i roto i te hanga o ngā LED, ngā hikohiko mana me ngā taputapu auau reo irirangi.

Te epitaxy SiC: I roto i te hanga taputapu hiko SiC, he tūāpapa pai ngā kaikawe SiC mō te tipu epitaxial o ngā papa SiC. Ko te tauwehenga whānui wera e tino rite ana ki ngā papa SiC ka whakaiti i te ahotea i puta mai i ngā huringa pāmahana i te wā o te tukanga epitaxy, ā, ka whakaitihia te tere hapa me te whakapai ake i te kounga o te paparanga epitaxial.

Te epitaxy e ahu mai ana i te silicon: I roto i ngā tukanga silicon matatau, ka taea hoki te whakamahi i ngā kaikawe SiC i roto i ētahi tukanga epitaxy silicon e hiahia ana kia teitei ake te pāmahana kia ōrite me te ma.

2. Whakawhitinga

Te whakamahana whakahohenga pāmahana-tiketike: Whai muri i te whakaurunga katote, ka whakamahia ngā kaikawe SiC i roto i ngā tukanga whakamahana pāmahana-tiketike mō ngā papa silicon, SiC rānei hei whakahohe i ngā tāpiringa kua whakauruhia, hei whakatika hoki i ngā kino o te whatunga. Mā te pumau pāmahana-tiketike me te kaha whakamahana ōrite o ngā kaikawe SiC ka whakarite i te whai huatanga o te tukanga whakamahana me te pumau o te papa.

Ngā kaikawe RTP (whakamahana tere): I roto i ngā taputapu whakamahana tere, ka taea e ngā kaikawe SiC te tu atu i ngā huringa wera kino o te whakamahana me te whakamatao tere, me te pupuri i te pumau hanganga, he mea e tika ana mō ngā tukanga matatau pēnei i te whakamahana tere.

3. Whakatonga Katote

Ngā kaikawe tāpiri me te whakatika: Ka whakamahia ngā kaikawe SiC hei whakapiri i ngā anga i te wā e whakatōngia ana te katote. Nā te kaha miihini teitei me te ātete ki te kakahu ka pumau te pumau i raro i te pupuhitanga hihi katote. I taua wā anō, nā te iti o ngā āhuatanga whakaputa matūriki ka whakaitihia te poke i te wā e whakatōngia ana.

4. Ko etahi atu tono

Tukanga whakairo: I roto i ētahi tukanga whakairo ICP (inductively coupled plasma) me te whakairo PSS (patterned sapphire substrate), ka whakamahia ngā kaikawe SiC hei taputapu whakapiri wafer, hei papa rānei nā te mea he ātete ki te waikura plasma me te iti o ngā āhuatanga matūriki.

Ngā ngongo/waka oumu para-teitei: I roto i ētahi oumu horapa, oumu waikura rānei para-teitei, ka hangaia hoki ngā rauemi SiC hei ngongo oumu, hei poti angiangi rānei hei whakarato i tētahi taiao tukanga tino ma.