Ngā rauemi kua whakamahia Mowhiti kuata AMAT

Ka whakaratohia e Semixlab he mowhiti quartz tino tika. Ko te nuinga o tēnei hua e whakamahia ana hei whakarite i te pumau o te whakatakotoranga o ngā kiriata kounga teitei i roto i te tukanga PECVD, me te whakanui ake i te whai huatanga o te whakaputanga o ngā taputapu me te hua o ngā wafers. Ko te tohatoha plasma e herea ana e te tika o te āhuahanga (±0.1mm), ka arotauhia te mara rere hau tauhohenga, ā, ka whakapai ake i te ōritetanga o te kiriata ki te σ≤1.5%. Nā ngā hua-taha o te tukanga adsorption kua whakaiti i te tere o te hapa wafer ma te 30%.

Taipitopito Tere:

Nga Ingoa: Mowhiti Quartz, Kawe Wafer Si, Kete Mowhiti Quartz、Kete Mowhiti Quartz，Mowhiti Rūma o Runga，Mowhiti Whakatakotoranga PECVD，Mowhiti Tohatoha Hau

Taumu'a: Me whakarite kia pumau te whakatakotoranga o ngā kiriata kounga teitei ki roto i te tukanga PECVD, me te whakanui ake i te whai huatanga o te hanga o ngā taputapu me te hua o ngā anga.

Tawhā matua: He mea tino taunakitia mō ngā tukanga whakatakoto SiN (silicon nitride), ka taea te whakarato ratonga paninga motuhake me te quartz parakore teitei. Ka taea e ia te tu atu i ngā pāmahana teitei o te 300 ki te 400℃+, te ātete ki te horo o te plasma, me te parakore o te quartz ≥99.99%, te iti iho o te poke o te konganuku i te 5ppm, te diameter mirumiru/whakaurunga ≤0.1mm, me te maha ≤3 ia henimita pūtoru.

Ngā mahi matua me ngā tūranga:

●Ngā wāhanga matua o te rūma: Kei roto i te rūma tukanga PECVD, ka hangaia e rātou he rohe nui o te rohe tauhohenga.

●Te ātete ki te pāmahana teitei me te ātete ki te toto: He mea hanga ki te Quartz parakore-teitei, he tino ātete ki te pāmahana teitei (ko te pāmahana tukanga PECVD kei roto i te awhe 300°C ki te 400°C+) me te ātete ki te horo o te plasma.

●Te wehewehe/te ārai hiko: He mea nui tēnei mō te whakamahana hiko i roto i te rūma, kia mau ai te whakaputanga o te plasma me te ōritetanga o te tukanga.

●Te hiri hau tukatuka:Āwhina ki te pupuri i te hiri o te taiao hau tukatuka i roto i te rūma.

●Te whakamāramatanga o te taiao tukanga wafer: Ko tōna āhua me te āhua o te mata e pā tika ana ki te tohatoha o te rere o te hau me te plasma i runga ake i te papa angiangi, he mea nui tēnei mō te ōritetanga me te kounga o te whakatakotoranga kiriata angiangi.

●Panihanga mata: Ko ētahi mowhiti kuata e whakamahia ana i roto i ngā tukanga motuhake (pēnei i te SiN2) ka pania pea ki ngā paninga motuhake (pēnei i te yttrium oxide Yttria) hei whakaiti ake i te whakatakotoranga hua taha, hei whakapai ake rānei i te mahi me te roa o te mahi i raro i ngā tukanga motuhake.

Ngā rauemi kua whakamahia Mowhiti kuata AMAT Ngā horopaki tono