He aha i kore ai e taurite ngā kōpae mānu hau i roto i te epitaxy pāmahana teitei

Mā ngā kōpae hau mānu e whakamahia ana i roto i ngā tukanga epitaxy pāmahana teitei ka pumau ngā papa, ā, ka tautokona hoki e te rere ōrite o te hau. I roto i te taiao whakaputa, ka kitea pea e ngā kaiwhakahaere i roto i tētahi wā ka ngaro te whakarara o ēnei kōpae. Ahakoa he iti noa te panoni mō te rere ōrite o te hau me te pumau o ngā papa, ka tīmata pea te kōpae piko mai i te iti o te pakaru, te kohikohi rānei i runga i te mata o te kōpae, ā, ka kino haere i roto i te wā. Koinei te mea me mārama hei karo i te wā kore mahi me te korenga o te hua. I roto i ngā tau, i roto i ngā mahi o ia rā i roto i te whare hanga, ka taea e te panoni iti o te pāmahana me ngā āhuatanga rere te whakararu i ngā kōpae i te tūnga tika i ēnei rā.

Ngā Tikanga Whakarerekētanga Wera i roto i ngā Kōpae Mānu Hau AMAT Centura5200

Ka ngāwari te ngaro o te papatahi o te kōpae hau mānu i roto i te pūnaha AMAT Centura5200 nā te wera. I te pāmahana tiketike Te tipu o te epitaxy , ka werahia te kōpae i roto i te āhua kore ōrite e te rūma tauhohenga. He nui ake te hihi me te kaha plasma e whiwhihia ana mai i runga, ā, ka rere te hau matao mai i raro. Ko te rerekētanga o te pāmahana ka arahi ki ngā ahotea wera i roto i te rauemi. Ko te huringa auau o te mata whakarewa, o te mata kua pania rānei me ngā pāmahana rerekē ka arahi ki te whānui me te whakaheke o te rauemi kōpae. Ahakoa he iti noa te ahotea i ia huringa wera, ina mahia tonutia mō ngā rau, ngā mano rānei ngā wā, ka tīmata te ahotea toenga kua kohia ki te whakawhanake i te whakarerekētanga wera. Ko ētahi wāhi ka whānui ake, ka totoro atu i ētahi atu, ā, ka arahi ki te piko iti i roto i te kōpae. Ka taea e tēnei piko iti te whakararuraru i te urunga hau e āhei ai te kōpae kia rere ōrite. Ka taea hoki te whakaputa i te whakarerekētanga wera e ngā pikinga pāmahana puta noa i te kōpae. Tērā pea tetahi wāhanga o te kōpae e tata ana ki te pūtake wera, e iti ake rānei te rere hau whakamatao i whiwhihia. Kātahi ka totoro atu tetahi wāhanga i tetahi atu. Tērā pea ka puta tēnei raruraru i muri i te tiaki, i te horoi rānei i te mea he maha ngā wā ka rerekē ngā āhuatanga rere hau, ā, he mea noa te kite i te taumata kōpae kore pumau i muri i te mahi i runga ake nei. He take anō hoki te ngoki. Ka puta te whakarerekētanga āta haere o te rauemi kōpae i te pāmahana teitei i raro i te kawenga pumau. He tukanga puhoi tēnei me te kore e pakaru ohorere; heoi, e tohu ana i te "maharatanga puhoi o te ahotea". I roto i ētahi whare hanga, kua pūrongohia i kitea he piko iti i roto i te kōpae i muri i ngā marama o te mahi me te kore he hapa e kitea ana. Ka kitea he tauira whakamārama mai i te Ko te epitaxy rārangi i te wā i whakaatu ai te wafer i te matotoru kāore i te ōrite. I te rangahau tupato i te kōpae hau mānu i roto i te ruma i kitea he kōpae piko. I tātarihia te pūtake mai i ngā huringa pāmahana teitei, me te rere whakamatao hau whakamuri kāore i te ōrite. Ko te pumau o te kōpae hau mānu e pā ana ki te tohatoha pāmahana whakahaeretia, te rere hau pono, me te whakakapi i ngā kōpae i mua i te tīmatanga o te ngoki nui.

He pēhea te pānga o te ōritetanga o te paninga CVD TaC ki te papatahi me te pumau o te kōpae?

Ko ngā paninga CVD TaC e whakamahia ana mō ngā kōpae hau mānu, nā te mea he pai te whanaketanga, he kaha te mahi ki te ātete i te wera me te waikura i raro i te taiao epitaxy pakeke. Ahakoa he rauemi paninga pakari o te tantalum carbide, kāore e taea te karo i te hiranga o te matotoru paninga ōrite ki te papatahi me te pumau i te wā e whakahaerehia ana he kōpae hau mānu. Ina tino ōrite te matotoru paninga puta noa i te mata katoa, ka horapa te kōpae i raro i te pāmahana teitei me te pēhanga teitei o ngā hau, ka horapa ōrite te wera puta noa i te kōpae me te iti o te ahotea o roto. I taua wā anō, ka taea te hanga i te urunga hau i raro i te kōpae kia ōrite ake, ka āwhina i te tūranga o te wafer kia pumau i te wā e tipu ana. Ka puta te raruraru ina he rerekē te matotoru o te paninga i runga i te mata katoa. Ko tetahi taha he wāhanga paninga matotoru ake ka tāpiri i te pakari atu ki taua rohe, ā, ka rerekē te urupare i raro i te pāmahana teitei, ka puhoi pea te horapa, ka heke rānei i te wāhi angiangi. Mā te whakamahana hurihuri tonu, ka taea e te kohikohinga taumahatanga i puta mai i aua rerekētanga te whakaputa i te ahotea ā-roto, ā, ka hua ake he piko ngawari o te turanga kōpae i tino papatahi i te tīmatanga. I roto i te whakaputanga tuturu, ka kite tātou i tēnei raruraru he teitei pōturi koretake, he tīmatanga rānei o te neke haere o ngā pokapū o ngā papa, ahakoa he āhua noa ngā mea katoa. Ka kitea pea e te miihini whakaputa ina kite rātou kua piki ake te rerekētanga matotoru o waenganui ki te taha o te papa kua whakatakotoria, engari, i te tirotiro i te rūma, ka kite pea rātou kua kore e tino kitea te "tauira hiki" o te kōpae pōturi e pā ana ki te rerekētanga paninga. Ka maumahara ahau ki tētahi tauira o tēnei raruraru i runga i te raina whakaputa SiC. He pai te āhua o te kōpae pōturi hau i muri tonu i te paninga. Kātahi ka tīmata te whakaatu i te piko ngawari i muri i te wā mahi pāmahana teitei. I kitea e mātou he rerekētanga matotoru o ētahi maikoromita i roto i te tātaritanga, ko te uara iti nei te take i paku piko ai te kōpae i te 1500C. Me whakahaere tika te tere rere o te hau, te āhua pāmahana me te hurihanga o te kōpae i te wā paninga i roto i ngā tukanga, me te ine i te matotoru o te paninga kia kore ai e neke wawe ngā āhuatanga o te tukanga, ā, ka whakatikatikaina anō te tukanga paninga.

Ngā Paerewa Whakatika Kōpae Mānu Hau AMAT mō ngā Tukanga Epitaxy Tika

He mea nui ngā kōpae hau mānu i roto i ngā taputapu epitaxy mō ngā taputapu tika pērā i te AMAT Centura hei whakau i te wafer i te wā e tipu ana te pāmahana tiketike. He tikanga tino pakari kei roto i te whakatikatika i ngā kōpae kua tawhito, kua hē te āhua, kua pania rānei kāore i te ōrite. Ko ngā hapa katoa i roto i te tukanga whakatikatika ka pā ki te whanonga urunga hau, ā, nō reira ki te kounga o te wafer. Ko te āhuatanga tino tere e arotakehia ana i muri i te whakatikatika ko te papatahi o te mata. Me tutuki te whakatikatika i ngā ātete papatahi tino pakari, nā te mea ahakoa he iti noa te piko ka taea te whakapōrearea i te taurite rere o te hau. Me whakarite e te huri, te whakakanapa rānei kia rite te nui o te rauemi ka tangohia mai i te mata katoa; ko te whakakanapa kāore i te ōrite te take o te nuinga o te rahunga wawe o te kōpae. He take tairongo hoki te whakatikatika paninga. Ko te nuinga o ngā kōpae he mea tiaki ki te CVD TaC me ngā paninga mārō rite. I te paninga anō, he mea nui kia whakarite kia ōrite te matotoru o te paparanga ki runga i te mata katoa o te kōpae. Ko te matotoru o te paninga kāore i te ōrite ka rerekē te urupare a taua wāhanga ina werahia, ā, ka taea te whai wāhi ki te piko, te hiki rānei i te wā e mahi ana. Kua kite ngā kaihanga i ngā kōpae e paahitia ana e te tirotiro ā-kanohi whai muri i te whakatikatika, engari ka puta he teitei pōturi kore i muri i ētahi huringa nā tēnei hapa. Ahakoa he iti noa te āhua, he mea tino nui te horoi i mua i te whakatikatika. Ka whakararu te korenga o ngā poke, ngā hua tauhohenga rānei i runga i te papa turanga i te pono o te hononga paninga hou. I runga i tētahi raina epitaxy SiC, i tukuna he kōpae kua whakatikatikaina ki te hanga, ā, i muri i te wiki kotahi i whakaatuhia he tohu wiri i runga i te wafer. I te tirotiro i muri i te whakatikatika o te kōpae i kitea he toenga kua mau i raro i te paninga whakatikatika e pōturi haere ana nā te huringa wera. I muri i te whakatikatika, he maha ngā wā ka whakatikatikahia ngā kōpae ki ngā pāmahana teitei hei whakamama i ngā ahotea i puta i te wā whakatikatika. Ka aroturukihia e ngā kaiwhakahaere te kōpae i roto i tēnei tukanga kia kitea ai ngā tohu wawe o te piko, te hiki koretake rānei. He mea nui kia kaua e whakatika noa i te kino, engari kia whakahokia mai te toenga taketake o ngā āhuatanga wera, te papatahi o te mata, me te toenga rere hau kia rite ai te mahi a te kōpae kua whakatikatikaina ki te mea hou i te wā whakaputa.

Te Hononga i waenga i te Tohatoha Wera me te Pūmautanga o te Whakahekenga Wafer

I te wā e whakataurite ana te rere o te hau i te wa e epitaxy ana, ko te tohatoha ōrite o te wera puta noa i te kōpae me te rūma te mea nui. Mena ka horahia te wera kia ōrite, ka ōrite te kiriata hau i raro iho, ā, ka noho taurite tonu te wafer. Ka tīmata te wera kore ōrite ki te whakararuraru i te taurite ngawari. I roto i te tukanga momo AMAT Centura, ka nui ake te wera o waenganui o te wafer i ngā taha. Ko te take o tēnei, kāore te whakamahana tonu e whakaputa ana i tētahi mahere wera ōrite puta noa i te mata o te wafer, ā, kāore pea te whakamatao o muri o te hau e ōrite. Ina wera ake te wafer i tētahi wāhi, ka nui ake te horapa i taua wāhi, ka neke ake te tauira rere o te hau i raro. Kia nekehia te rere o te hau, ka rerekē te teitei o te levitation o te wafer. Ka rere tetahi taha o te wafer ki runga ake i tētahi atu. Ahakoa kāore pea tēnei e kitea i ngā wā katoa e te kanohi tahanga, ka taea e te taputapu tukatuka te pānui i tēnei hei nekehanga iti, hei oscillation rānei i te wā e tipu ana. Ko te huarahi māmā ki te whakaaro i tēnei ko te whakaaro i tētahi pūka hau hau tino angiangi engari he mahana ake tetahi taha o te mata tākaro; Ka mānu tonu te pū, engari ka nekeneke, ka piko rānei ki te taha mātao o te mata. He rite tonu te ariā mō te rūma whakatipu. I te wā o te hanga tuturu, ka puta mai tēnei hei rerekētanga matotoru o te taha ki waenganui i runga i ngā papa, me/ranei he nekehanga iti i roto i te whakaritenga i muri i ngā oma roa. I pāngia tētahi tīma hanga e te tipu epitaxy kāore i te tino pumau i muri i te mahi tiaki, ā, i kitea mā te tirotiro kua mahia he whakarerekētanga ki te kōtaha whakamahana rūma; i nekehia paku e rātou te rohe wera, i aukati i te hau e whakataurite ana i te kōpae kia kore e mahi pērā me te wera kore taurite.

Hei whakaiti i te kore pumau o te kōpae e titia ana, ka aro nui ngā kaiwhakahaere ki ngā mea matua e toru: ngā āhua ōrite o ngā wāhanga whakamahana, te rere ōrite o te hau i te taha o muri, me ngā huringa katoa o te kakahu o te mowhiti-O o te rūma me te mata o te kōpae.

Te Arotau i te Hoahoa Kōpae Mānu Hau mō te Pono o te Wera mō te Wā Roa

Ko te hoahoa i te kōpae hau mānu hei whakamahi mō ngā huringa maha i roto i te taputapu epitaxy, ko te nuinga o te wā ko te mahi wera. Ehara i te mea me mahi noa i ngā pāmahana teitei, engari me mahi i muri i te 100 ki te 1000 o ngā oma, me te kore e memeha haere. He mea nui te whiriwhiri rauemi i konei. Me kaha te rauemi papa ki te haere i te huringa wera me te kore e whakaputa i te kōtaha ahotea nui i roto i te wā. Ka kohia ngā ahotea mena he nui ngā tauwehenga o te rauemi, ā, ka tere te haere o ngā huringa wera. Me pai hoki te taurite o te whānui wera o te papa ki te paninga o runga. I roto i te taiao hanga, ahakoa ngā hapa wera iti i waenga i ngā rauemi ka nui haere i roto i te wā, ā, ka piko te kōpae, ahakoa i te tīmatanga ka pai pea te āhua. He mea nui anō hoki te hoahoa paninga o runga. Mā te paninga CVD TaC ōrite puta noa i te kōpae ka āwhina i a ia ki te mimiti i te wera puta noa i tōna mata. Mena he rerekē te matotoru o te paninga, ka rerekē ngā tere tauhohenga wera puta noa i te mata, ka puta he ahotea i puta mai i te wera ka piko te kōpae i roto i te wā. E whakaponohia ana i roto i ētahi tīma whakaputa ka puta pea tēnei i ngā wā roa i te mea ka āta neke haere ngā kōpae mai i te papatahi ki te āhua porowhita. He mea tino nui hoki ngā āhuatanga āhuahanga. Ko ngā rerekētanga o te tauira kōhao, te matotoru o te taha, ngā rohe tautoko, me ētahi atu āhuatanga, ka rerekē te whanonga o te rere hau i raro i te kōpae. Ka taea e te rere kore ōrite te mea ka ara ake te kōpae i raro i ngā āhuatanga tukatuka, ka puta he ahotea tāpiri i te wā huringa wera, ka tere ake te kakahu. I kitea he tauira o tētahi hoahoa kua whakapaitia e mahi ana i raro i te ahotea wera i runga i tētahi raina epitaxy SiC; i mua i tā rātou huri ki tētahi hoahoa kōpae kua whakahoutia, he nui te nekenekehanga taumata i muri i ngā oma roa. I te huri ki tētahi kōpae me ngā hongere rere kua arotauhia, ka heke te nekenekehanga, i te mea i mau tonu te āhua hiki o te kōpae i te wā katoa o te mahi e whakaūtia ana e ngā tirotiro tiaki wā roa o ngā kōpae taketake me ngā kōpae kua whakapaitia. Ko te pono o te wera ka whakawhirinaki hoki ki ngā āhuatanga whakamatao. Mena kāore te kōpae e whakamatao ōrite, ka taea e tēnei te "maukati" i te ahotea, ā, ko te mutunga ka puta he hekenga atu me te huringa. Ko te tikanga, ko te papatahi mō te wā roa ka puta mai mā te whakatutuki i te taurite i waenga i te mahi rauemi me te paninga me te rere hau kua hoahoatia i roto i te kōpae.