Me pēhea te whiriwhiri i te mowhiti arotahi tika mō te whakairo plasma semiconductor?

Kupu Whakataki: He aha te Hiranga o ngā Mowhiti Arotahi Ā-Haumaru i roto i te Hanganga Matatau

I roto i te hangahanga haurua-ā-ira hou, ko te whakatutukitanga o te hua wafer teitei me te mahi pumau o te taputapu ehara i te mea e whakawhirinaki ana ki te hangarau lithography me te whakatakotoranga matatau anake, engari ki te whakahaere tika hoki i ngā tikanga tukatuka plasma. I roto i ngā wāhanga maha i roto i te rūma whakairo plasma, he mahi nui tā te Mowhiti Arotahi Haurua-ā-ira engari he maha ngā wā ka iti haere te aro.

He wāhanga tino tika te Mowhiti Arotahi e tāutahia ana ki te taha o te wafer i runga i te pūwero hiko (ESC). Ko tana mahi matua he whakahaere i te tohatoha plasma, he whakahaere i ngā mara hiko o te taha, me te pupuri i te rere katote ōrite puta noa i te mata o te wafer i te wā e keri ana i te plasma.

I te haere tonu o te whakawhānui ake o ngā taputapu haurua-ira ki ngā pūnga arorau matatau, te mahara kiato-teitei, me ngā taputapu hiko whānui-rohe, kua piki haere te tono mō te whakairo plasma. Ka pā tika ngā rerekētanga i te taha o te wafer ki te whakahaere i te taha matua (CD), te ōritetanga o te whakairo, te whakaputa hapa, me te hua whakaputa whānui.

Nō reira, ko te whiriwhiri i te rauemi Mowhiti Arotahi e tika ana kua waiho hei whakatau hangarau nui mā ngā kaihanga taputapu haurua-ira me ngā papanga wafer. Ngā rauemi rerekē-tae atu ki te silicon, te quartz, te silicon carbide (SiC), te alumina, me ngā uku yttria-He rerekē ngā painga o ēnei mea i runga i te matū o te parāoa, te pāmahana o te tukanga, ngā whakaritenga mō te roanga o te ora, me ngā paerewa whakahaere poke.

He aha te Mowhiti Arotahi Ā-Haumaru, ā, he aha tāna mahi?

Ko te Mowhiti Arotahi Ārahi Ārahi he wāhanga whakahaere parāoa porohita e whakamahia ana i roto i ngā taputapu whakairo maroke, tae atu ki ngā pūnaha parāoa honohono capacitively (CCP) me ngā pūnaha parāoa honohono inductively (ICP).

I te wā e whakairohia ana te plasma, ka pāngia te pokapū me te taha o te wafer e ngā taiao hikohiko rerekē nā te mea kāore te wafer e toro atu ki tua atu i tōna rohe ā-tinana. Ki te kore he utu, ka kore e pumau te mātotoru plasma, te kaha katote, me te tohatoha o te mara hiko e tata ana ki te taha o te wafer, ka puta he pānga taha pēnei i:

l Te tere o te haehae kore-taurite

l Rerekētanga ā-ahu nui

l Te whakairo nui rawa o te taha

l Te whakapōturitanga o te kōtaha

l Te whakahekenga o te hua o te wafer

Ka hangaia e te Mowhiti Arotahi he taiao plasma whakahaeretia huri noa i te taha o te wafer. Mā te whakarato i tētahi āhua rohe hiko me te āhua ā-tinana rite, ka āwhina i te pupuri i te whanonga plasma ōrite mai i waenganui ki te taha o te wafer.

I roto i te hanga haurua-haurua matatau, ka mahi tahi te Mowhiti Arotahi me ētahi atu wāhanga nui o te rūma, tae atu ki te pūwero hiko (ESC), te pane kaukau, te arai rūma, me te irahiko o runga, hei whakatutuki i ngā āhuatanga tukatuka parāuma pumau.

Mowhiti Arotahi Ārahi Pūrua Noas

Ko te mahi a te Mowhiti Arotahi ka tino whakatauhia e ngā āhuatanga o ōna rauemi. Ka tīpakohia e ngā kaihanga hiko hiko ngā rauemi rerekē i runga i te matū plasma, ngā whakaritenga tukanga, me te roanga o te wā e tumanakohia ana mō te wāhanga.

1. Mowhiti Arotahi Silicon

Ko te silicon tētahi o ngā rauemi e whakamahia whānuitia ana mō ngā Mowhiti Arotahi semiconductor, inā koa i roto i te tukatuka anga silicon.

Nā te mea he rite ngā āhuatanga matū o te silicon ki te anga silicon e tukatukahia ana, ka taea e te Mowhiti Arotahi Silicon te whakarato i te whanonga whakairo e tino matapaetia ana me te ōritetanga o te taha tino pai.

Ko nga tono angamaheni kei roto:

l Te whakairo silicon

l Te whakairo ira tauhohenga hōhonu (DRIE)

l Te hanga taputapu arorau

l Te hanga mahara

Ko te painga matua o ngā Mowhiti Arotahi silicon ko te hototahitanga o ngā tukanga. Nā te mea he rite tonu te tauhohenga o te wafer me te Mowhiti Arotahi i raro i ngā āhuatanga plasma, ka taea te whakaiti i ngā pānga taha.

Heoi, he iti noa te ātete o te silicon ki te plasma ki te whakataurite ki ngā rauemi uku matatau, ā, he poto ake te roa o te ora mahi i roto i ngā taiao plasma kaha.

2. Mowhiti Arotahi Silicon Carbide (SiC)

Kua riro te Mowhiti Arotahi SiC hei tētahi o ngā rauemi tino nui mō ngā tono whakairo plasma matatau.

He tino pai ngā āhuatanga o te silicon carbide, tae atu ki:

l Te ātete teitei ki te waikura plasma

l Te whakahaere waiariki nui

l Te kaha o te miihini

l Te whakaputanga matūriki iti

l He pai te pumau o te ahu

E whakamahia whānuitia ana ngā Mowhiti Arotahi SiC i roto i:

l Te whakairo hiko-kore

l Te whakairo waikura

l Te tukatuka haurua haurua silicon carbide

l Te hanga taputapu GaN

l Ngā tono plasma kiato-teitei

Ki te whakatauritea ki ngā rauemi silicon, quartz rānei tuku iho, he roa ake te ora o te SiC me te pumau pai ake i raro i ngā āhuatanga plasma mana-tiketike.

Mō te hanga arorau me te mahara matatau, kei te piki haere te whakamahinga o ngā Mowhiti Arotahi CVD SiC tino parakore nā te mea he pai ake te kiato, te parakore, me te ātete ki te plasma e hangai ana ki te wheowhio.

3. Mowhiti Arotahi Quartz

Kua roa te whakamahinga o te kuata i roto i ngā mahi tukatuka parāuma nā te mea he tino parakore, he pai hoki ōna āhuatanga ārai hiko.

Ko nga painga ko:

l Teitei o te parakore matū

l Ngā āhuatanga hiko pai

l Te whanonga hiko pumau

Heoi, he iti ake te kawe wera o te kuata, ā, he iti ake te ātete ki ngā matū parāuma kaha pērā i ngā hau whakairo e ahu mai ana i te wheowhio.

4. Ko ngā Mowhiti Arotahi Quartz e kitea ana i roto i:

l Ngā tukanga haurua-ā-ira pakeke

l Ngā pūnaha PECVD

l Ngā tono plasma iti-kaha

Mō te hanga rahinga nui matatau, ka whakakapia haeretia te kuata e te SiC me ngā rauemi uku matatau.

5. Konumina (Al₂O₃) Mowhiti Arotahi

He pai te kaha ā-ringa o ngā Mowhiti Arotahi uku alumina, he pai te whakamarumaru hiko, ā, he pai hoki te utu.

Ka whakamahia noa i roto i:

l Te whakairo plasma whānui

l Ngā wāhanga taputapu haurua-arataki

l Ngā taiao plasma iti ake te kaha

Ahakoa he pai te ātete o te alumina ki te parāoa plasma, he iti iho te mahi a te alumina i raro i te pānga nui o te fluorine ki te parāoa plasma i te SiC, i ngā uku yttria rānei.

6. Yttria (Y₂O₃) Mowhiti Arotahi

Kua piki haere te aro o te hanga uku Yttria ki ngā mahi hanga haurua-ā-ira matatau nā tōna ātete tino pai ki te plasma fluorine.

Ko nga painga matua ko:

l He iti rawa te whakaputanga matūriki

l He ātete pai rawa atu ki te waikura plasma

l Te roa o te mahi

Ko te nuinga o ngā mowhiti arotahi Yttria e whakamahia ana i roto i:

l Te hanga mahara matatau

l Te whakairo ōwehenga āhua teitei (HAR)

l Ngā tukanga plasma o te whakatupuranga e whai ake nei

Ko te herenga nui ko te utu whakanao teitei ake nā te uaua o ngā whakaritenga tukatuka uku.

Whakataurite i ngā Rauemi o te Mowhiti Arotahi Ārahi

Me pēhea te whiriwhiri i te mowhiti arotahi tika mō te whakairo plasma?

Ko te whiriwhiri i te Mowhiti Arotahi Whakairo Plasma tika me whai taurite te mahi o te tukanga, te pakari o ngā rauemi, me te utu katoa o te mana pupuri.

Ko ngā āhuatanga aromatawai matua ko:

1. Hototahi ki te Matū Plasma

Ngā hau rerekē pērā i te CF₄, CHF₃, NF₃, SF₆, me Cl₂ ka waihanga i ngā taiao waikura rerekē. Me whiriwhiri ngā rauemi i runga anō i ngā āhuatanga o te pānga ki te plasma.

2. Te Pūmautanga o te Mahana Tukanga

Ka nui te ahotea wera e puta mai i ngā tukanga whakairo matatau. Ko ngā rauemi he nui te kawe wera me te iti o te horapa wera, pērā i te SiC, ka pai ake te pumau o ngā āhuatanga.

3. Te Whakahaere Matūriki

Mō ngā pūnga haurua-whakamua matatau, ka pā tika te poke o ngā matūriki ki te hua. Ko ngā rauemi SiC me te yttria tino parakore e whakarato ana i te pumau o te mata tino pai me te iti o te whakaputa matūriki.

4. Te Whai Hua me te Whai Hua o te Utu

Ahakoa he nui ake ngā utu tīmatanga o ngā uku matatau, nā te roa o te ora me te iti o te auau tiaki ka tino whakaiti i ngā utu whakahaere taputapu katoa.

FAQs

Q1: He aha te Mowhiti Arotahi Ā-Haumaru?

He wāhanga whakahaere parāma te Mowhiti Arotahi Ā-Haumaru e tāutahia ana ki te taha o te wafer i roto i ngā taputapu whakairo maroke. Ka āwhina i te pupuri i te tohatoha parāma ōrite, ā, ka whakapai ake i te mahi whakairo taha wafer.

P2: He aha i whakamahia ai te SiC mō ngā Mowhiti Arotahi mō ngā Semiconductor?

E whakamahia whānuitia ana te SiC nā tōna ātete pai ki te waikura plasma, tōna kawe wera nui, tōna kaha miihini, me tōna iti o te whakaputa matūriki, ā, he pai mō ngā tukanga whakairo matatau.

Q3: He aha ngā rauemi e whakamahia ana mō ngā Mowhiti Arotahi Ārahi-Haumaru?

Ko ngā rauemi noa mō te Mowhiti Arotahi ko te Silicon, te Quartz, te Silicon Carbide (SiC), te CVD SiC, te Alumina, me te Yttria (Y₂O₃) ngā mea uku.

Q4: Me pēhea taku whiriwhiri i te rauemi tika mō te Mowhiti Arotahi?

Ko te kōwhiringa e whakawhirinaki ana ki te matū o te parāuma, te pāmahana o te tukanga, ngā whakaritenga whakairo, te whakahaere poke, ngā tumanakohanga mō te roanga o te ora, me te utu whānui o te mana whakahaere.

Q5: He aha te rerekētanga i waenga i ngā Mowhiti Arotahi Silicon me SiC?

He tino pai te hototahitanga o ngā Mowhiti Arotahi Silicon mō te whakairo silicon, ā, he pai ake te ātete plasma, he roa ake te ora, me te pumau ake mō ngā tukanga semiconductor matatau nā ngā Mowhiti Arotahi SiC.