Ko te paninga CVD Tantalum Carbide (TaC).

Ko te paninga TaC ka whakaarohia i te nuinga o te wā ina tīmata te SiC ki te eke ki ōna rohe. He maha ake te puta o tēnei i roto i te epitaxy SiC, i te tipu tioata rānei, ina nui ake te pāmahana me te āhuarangi tukanga.

He nui ake te pūmahana rewa o te TaC, ā, he pai ake te tu atu ki te pāmahana teitei mō te wā roa, inā koa i roto i ngā taiao kei reira te hauwai, te HCl rānei. I roto i te mahi, he rerekētanga tēnei i roto i ngā tukanga pēnei i te tipu PVT, e pā tika ana te pumau o te pāmahana ki te kounga o te tioata.

Ko ngā whakamahinga noa ko ngā mowhiti arataki rere, ngā pupuri purapura, ngā wāhanga e pā ana ki te oko whakarewa, me ētahi atu hanganga i roto i te papa wera. Ka roa te wā e pāngia ana ēnei wāhanga e ngā āhuatanga kino, nō reira he mea nui te whakaiti i te pirau. I ētahi whakatakotoranga, kei te whakakapi haere a TaC i ngā rauemi tawhito pēnei i te pBN, tae atu ki ētahi wāhanga kua pania ki te SiC, ahakoa kei te whakawhirinaki tonu tēnei ki te utu me te hoahoa tukanga.