Te Whakamātautau i te Kaha Piri o te Paninga CVD TaC me ngā Mōrearea o te Tihorenga

Mō ngā paninga motuhake ki te karāpeti, CVD TaC a Cvd sic paninga Mō ngā wāhanga o ngā mīhini hanga maramara pāmahana-tiketike, ko te mahi piri o te paninga ki te wāhanga te mea tino nui ki te roa o te ora o ngā wāhanga. Ka puta he pakaru iti me te kiri i roto i ngā tukanga wera me te whakamatao i te hononga ngoikore, ka puta he poke, he parenga koretake rānei, ā, ka rahua te tukanga. He maha ngā wāhanga ka ātaahua te āhua i te tīmatanga i te wheketere, ā, ka kiri te taha i muri i te whakamahinga maha. Nō reira, me whakamātautau te kaha o te piri i mua i te whakamahinga o ngā wāhanga i te wheketere kia kore ai e rahua ngā mīhini.

Ngā Whakamātautau Piri Paerewa mō te Paninga CVD TaC i runga i ngā Papa Graphite

Hei kimi i te kaha ōrite, he maha ngā whakamātautau kounga e whakahaerehia ana i roto i ngā wheketere; ko te whakamātautau rakuraku tuatahi. I konei, ka tōia he pito taimana ki runga i te paninga i raro i te kaha e piki haere ana, ki te pakaru, ki te marere, ki te wetewete rānei te kiriata mai i te paparanga graphite i te wā wawe, ka kitea he koretake te piri. He whakamātautau māmā noa iho tēnei engari e whakaatu ana i ngā hua mārama i mua i te tīmatanga o te mahi a ngā wāhanga.

Ko tētahi atu whakamātautau tere ko te whakamātautau rīpene, ka tāpirihia he rīpene piri ki te kiriata, kātahi ka tangohia; ki te tangohia ngā kongakonga me te rīpene, tera pea ka ngoikore te hononga ki te turanga karāhe. He whakamātautau tere tuatahi tēnei e whakamahia ana i roto i ngā taiwhanga i mua i ngā whakamātautau pakari ake.

He tino rongonui hoki te whakamahana me te whakamatao anō, nā te mea he tino whai te tukanga i te whakamahinga tūturu. Kāore he pānga kino o ngā paninga pakari, engari ka tīmata te pakarukaru, te tihore rānei i te taha o ngā paninga ngoikore. I tētahi āhuatanga wheketere, i rahua ngā paninga i te tirotiro tuarua i muri i te whakamahana anō (te tihore i ngā taha) ahakoa nā te poke o te papa i mua i te whakamahinga.

Ko te whakamātautau huti-ake (te whakapiripiri i tētahi titi ki te paninga, kātahi ka hutia kia matara atu te papa i a ia) tētahi atu whakamātautau, e homai ana i te uara ki tētahi rārangi, he pai mō te whakatairite i ngā puranga engari ka roa pea te wā ki te mahi. Ka whakamahia te whakamātautau kōpiko hei whakamātautau tirohanga me te ine, te wāhi ka werohia he pito mārō ki roto i te paninga, ā, ka inehia te whānuitanga o te hanganga kapiti. Ki te mahi tahi tika, ka whakarite ēnei whakamātautau i te pai o te hanganga o te paninga.

Ngā Tohu Whakatūpato Moata o te Peeling o te Paninga TaC i roto i ngā Whakamahinga Epitaxy

He iti noa ngā wā ka pakaru ohorere te paninga i roto i ēnei momo mīhini. I te nuinga o te wā ka puta he panoni iti ki te wāhanga, engari kāore e kitea. Ka puta wawe te panoni tae o te paninga. Me āhua ōrite, me maeneene hoki te paninga hou, engari i raro i te taumahatanga ka ahua mangu te tae o ētahi wāhanga, inā koa i ngā taha, i ngā kokonga me ngā wāhi e wera nui ana.

He maha ngā wā ka ara ake ngā taha iti nei, ā, ka rite ki te paparanga paninga tū i ngā rohe mēnā ka tirohia i roto i te mārama i te koki tika, i te whakanui rānei. I roto i tētahi rārangi wheketere, i kite tētahi kaimahi horoi i ngā matūriki puehu angiangi i te taha o te taha o te wāhanga, ā, i kitea kua tīmata kē te pakarukaru i te taha.

He tohu raruraru anō hoki ngā pakaru o te kiri. He pakupaku, he papatahi hoki ngā pakaru tuatahi, ā, ka puta ki ngā rohe e pāngia ana e te wera, ā, ka honoa hei hanga i ngā rohe pakaru nui ake mēnā kāore te pakaru e whakatikaina. Ko ētahi atu tohu ngaro ko te pikinga o te nui o te matūriki, te puehu rānei i roto i te ruma.

Ahakoa kāore pea he hapa e kitea ana i runga i te paninga, tera pea ka maringi ngā matūriki mai i te paninga i te wā e whakamahia ana, ā, ka kitea pea i runga i ngā aroturuki i mua i te pakaru nui. Ka piki ake te taratara, i te mea ka puta he āhua kirikiri te paninga maeneene i mua nā te pirau o te paparanga o runga o te paninga.

I te mea ka taea e tētahi hapa iti i te taha te whanake hei rahunga nui atu ka whakararu i te kounga me te hiahia kia wā mutu te mahi a te mīhini, he mea nui te tautuhi wawe i ēnei tohu.

Ngā Pānga o te Huringa Wera ki ngā Wāhanga Epitaxial kua Panihia ki te CVD TaC

Nā te mea ka whakamahanahia, ka whakamataohia hoki ngā wāhanga pania i te awatea, ka puta he ahotea kaha ki runga i te paninga i te wā. Ina whakamahanahia ngā wāhanga, ka whānui te paninga me te karāpiti, engari i ngā tere rerekē. Nō reira, ka puta he ahotea i waenga i ngā rauemi e rua i te hononga i ia huringa wera. Ina whakamatao te wāhanga, ka huri te ahotea ki tētahi atu taha. Kāore tetahi huringa whakamahana me te whakamatao e kino, engari i roto i ngā rau o aua huringa ka puta he ahotea iti o roto.

He maeneene, he pumau hoki te paninga, engari i muri i te huringa auau o ngā huringa pāmahana, ka puta he wāhi ahotea iti i ngā taha koi, i te wera koretake rānei. Ka roa te noho o waenganui o te wāhanga, ka pakaru te taha o waho i roto i ngā taputapu. He tauira noa te kapiti iti i te taha o ngā wāhanga, i muri i te whakamahinga maha ka puta i te taha, ā, ka tīmata te tipu haere i te mea ka peia e te ahotea kia wehe i muri i ia huringa wera, ā, ka tihorea ngā kongakonga iti.

Mā te whakamahana me te whakamatao tonu ka memeha haere te anga o roto o te paninga, ā, he iti noa ngā wāhanga ka eke ki te whakamātautau tuatahi, heoi, i muri i te whakamahinga roa (mō ētahi marama) ka noho tonu te pakaru. I tētahi wā, kua tīmata te tihore o ngā wāhanga i muri i ētahi rau huringa nā te tere o te whakamahana ka nui rawa te taumahatanga, he rerekē ki te puhoi o te whakamahana.

Ngā Tikanga Maimoatanga Mata hei Whakapai ake i te Kaha o te Hononga Paninga

He nui te whakaritenga me mahi ki ngā wāhanga karāpiti i mua i te paninga o tētahi momo paninga kia piri ai te paparanga. Ki te kore e pai te whakaritenga o tētahi paninga, ka tere rawa te pakaru o te paninga. Ko te horoi hohonu i tētahi wāhanga karāpiti tētahi āhuatanga o tēnei whakaritenga. Ka ngāwari te karāpiti ki te hopu i te puehu tino angiangi, ngā hinu toenga, ngā matūriki miihini rānei i roto i ōna pū. Ka āraihia e ēnei mea te paninga kia kore e pā tika ki te turanga.

Ahakoa he kiriata hinu iti rawa, ka hangaia he wāhi ngoikore i roto i te hononga, ka waiho hei wāhi mō te tīmatanga o te tihorenga. Ko te tikanga, ka whakamahia he wai horoi motuhake, i ētahi wā ka tunua te wāhanga ki roto i te oumu hei tango i ngā toenga hohonu kua noho ki roto.

Ko tā te mahi tuarua ko te whakarite kia paku whakarara te mata hei whakanui ake i te kaha o te pupuri o te paninga i tērā mēnā he tino maeneene te mata. Ko te tikanga o tēnei ka tutuki mā te pupuhi onepu, mā te whakamahi rānei i ngā taputapu mīhini hei whakatutuki i tētahi mata taratara engari he pumau hei pupuri mā te paninga kia "mau" ai, mā te whakamahi rānei i ngā maimoatanga plasma e pupuhi ana i te mata graphite ki te hau mō tētahi wā poto hei whakahohe me te whakarite matū kia hototahi ki ngā rauemi paninga, engari kāore he pānga kino ki te āhua o te papa.

Ka whakamahia ngā maimoatanga wera o ngā wāhanga karāpeti i mua i te paninga, nā te mea ka taea e te tunu wera nui o tētahi wāhanga te pei i ngā hau kua mau i roto i te rauemi. Tērā pea ka puta ēnei hau i te wā e whakatakotoria ana he paninga, ka hanga he wāhi pai mō tētahi wāhi ngoikore, mō tētahi pupuhi rānei i raro i te paninga. Ko te tikanga ka whakakotahihia ēnei tukanga.

Te Tātaritanga o te Rahunga o ngā Mowhiti Paninga-TaC e Whakamahia ana i roto i ngā Pūnaha LPE (ASM)

Ka mahi ngā mowhiti karāpiti pania i raro i ngā āhuatanga tino kino tae atu ki te pāmahana teitei, te rere hau teitei, me ngā huringa wera. Ko ngā tikanga rahunga o ngā mowhiti karāpiti pania e hono pinepine ana ki te ahotea paninga, te kounga o te mata me te ngenge wera.

Te wehewehenga o te taha, ina wehea te paninga mai i ngā taha o ngā taha koi me te wāhanga angiangi nā te mea ka tere ake te whakamatao me te whakamahana i ngā wāhanga papatipu. I muri i te tīmatanga o te hiki i te taha, ka tipu haere tēnei āhuatanga, pērā i te whakatuwheratanga o te reti i te taha.

Ka puta pea ngā kirikiri iti i te mata o roto, ina nui ake te rere o te hau, ā, ka puta he wāhi wera i te rohe. I kitea he puranga puehu pango angiangi i roto i tētahi pūnaha kua honoa ki ngā kapiti angiangi i te pakitara o roto o te mowhiti. Ko te korenga o te hononga hononga tētahi atu tikanga matua; ko te ngoikore o te piri i raro i te paparanga e pā ana ki te kiri ohorere, te nui o te wāhi mai i te mata kāore i horoia tika, i ngā hau rānei kua mau i te hononga e whānui ana.

I tētahi atu taha, nā te tere o te huringa wera, ka puta te ru wera e tere ai te hanga o ngā ahotea wera i te atanga o te paninga/turanga. I roto i tētahi tukanga whakaputa, he torutoru noa ngā marama i roa ai te mowhiti. Ahakoa te āhua noa i te tīmatanga, ka piki haere tonu te taumata matūriki, ā, i te tangohanga atu kua pakaru tetahi wāhanga nui o te paninga i te taha o ngā pūwāhi whakapiri.

I puta mai tēnei hapa i te korenga o te whakamahana ōrite me te korenga o te horoinga o ngā taha i mua i te paninga. Ahakoa ka tipu ake ngā hapa i ngā hapa iti i te roanga o te wā, ko te tirotiro auau me te pāmahana whakamahana pumau he huarahi pai hei ārai i ēnei momo hapa.