He aha te mea nui o te Graphite Parakore-Teitei mō te Whakahaere i ngā Koha Epitaxy SiC

Ahakoa ngā panonitanga iti o te taiao tipu, ka pāngia te kounga o te wafer silicon carbide (SiC) e ngā panonitanga iti o te taiao tipu. Ko tētahi wāhi kāore e whakaarohia ana e te tini ko te karāpeti e whakarārangi ana i te tauhohenga. Ka tu pakari i te whakamātautau o te wera nui kei roto i te tauhohenga i a ia e tautoko ana, e whakanoho ana hoki i te wafer i te wā epitaksiya ana. Mena he poke, he hanganga koretake rānei te karāpeti, ka taea te whakatakoto i ngā wahi iti o te rauemi, i tētahi tauhohenga kāore e hiahiatia rānei puta noa i te tukanga tipu. Ka taea e ngā raruraru iti i runga i te mata o te karāpeti te puāwai hei hapa nui o te wafer, ka nui ake te mahi me te iti iho o ngā hua mō ngā kaihanga maramara. Nō reira, ko te āhua me te ma o te Kaitātari graphite he take nui ake i tā te nuinga e whakaaro nei.

He pēhea te awe o te parakore o te karāpiti ki ngā take matūriki i roto i ngā rūma epitaxy?

He hapa whānui ngā matūriki i roto i ngā rūma epitaxy SiC, ā, he maha ngā wā ka uru te karāpeti ki roto i te tukanga. Kei te rohe wera o te tauhohenga SiC ngā wāhanga karāpeti, e kawe ana i te karāpeti, e pā ana ki ngā āhua wera. Mā te whakamahi i te karāpeti iti ake te parakore, ka taea e ngā poke iti, pērā i ngā poke whakarewa, te pungarehu, ngā toenga tukanga rānei, te puta mārire mai i te karāpeti i te wā e tipu ana te pāmahana teitei. He maha ngā wā kāore e kitea ngā poke kua tangohia mai i te hau i roto i te rūma, engari ka tau ki te mata o te karāpeti, ka noho rānei hei wāhanga o te āhua hau. Hei tauira, i roto i tētahi tono, i whiriwhiria e tētahi kamupene he karāpeti iti ake te kounga hei penapena utu. Ahakoa kāore he raruraru i kitea i ngā wā poto i te tīmatanga, i muri i ētahi huringa o Ko te epitaxy , i kitea ngā kōhao iti me ngā ira taratara i runga i te mata o te papa. Ko te pūtake o ēnei hapa i ahu mai i ngā matūriki moroiti i tukuna mai i te kaipupuri karāpeti, i te pūwero rānei. Ka uru ngā matūriki ki te rūma tipu, ā, ka mahi hei purapura i roto i te āhua kāore e hiahiatia. Ko te koretake o te matotoru o te wāhanga karāpeti ka whai wāhi atu ki te pakaru moroiti i runga i te mata o te wāhanga i te wā e whakamahanatia ana, ka arahi ki te maringi o ngā matūriki pai ki roto i te rūma i roto i te wā, ahakoa he ahua ma te wāhanga. Nō reira, ko te aroturuki i te pūtake o te karāpeti me tōna hītori he mahi noa i roto i ngā whare hanga hei karo i ngā hapa e pā ana ki ngā matūriki. He mea hiahia te karāpeti parakore teitei me te nui o te pungarehu kua whakahaeretia, inā koa mō ngā mahi whakaputa mo te wā roa. Ka aroturukitia hoki te tatau i ngā huringa wera o ngā wāhanga i te mea ka pakaru ngā matūriki e ngā rauemi ahakoa i muri i ngā tukatuka tuatahi pai. Waihoki, ko te tikanga tiaki mō ngā wāhanga karāpeti ka pā ki ngā hapa. Hei tauira, ko ngā tikanga horoi kaha ka kino te mata karāpeti, ā, ka puta he pakaru moroiti. Ko te tikanga pai ko te tukanga horoi ngawari, whakahaeretia me te iti o te taunekeneke tinana me ngā wāhanga karāpeti. Mō ngā take ōhanga, he pai ake pea te whakakapi i ngā wāhanga i mua atu i te wā i whakaarohia ai i te whakatau i te ngaronga o te hua i ngā wāhanga o muri mai. I roto i te poto, ko te whakahaere i te whakaputanga matūriki i roto i te tukanga epitaxy SiC noa e aro ana ki ngā taipitopito iti mō te kounga o ngā rauemi me ngā mahi whakahaere. Ko te take o te kounga o te karāhe te kaupapa matua o te take.

Ngā Whakaritenga Rauemi mō ngā Wāhanga Epitaxial SiC me ngā Pūmau Whakapūmau

Mō te epitaxy SiC, ehara i te mea ko te 'pupuri' noa iho i te wafer ngā wāhanga o te tauhohenga. Ka pā tika ngā ārai, ngā kaikawe karāpeti me ngā wāhanga rohe wera i roto i te tauhohenga ki te tipu o te tioata. Koia te take he tino uaua ngā rauemi, ā, ka puta he hapa iti hei hapa i te wafer. He whakaritenga matua te pumau wera teitei. Ka whakamahanahia ngā wāhanga ki ngā pāmahana tino teitei mō te wā roa (i ētahi wā he huringa whakamahana/whakamatao auau). Ka hē te rauemi kāore e taea te pupuri i te pumau i ēnei pāmahana, ā, ka pakaru pea i te mutunga. Ka taea e ngā huringa iti o te āhuahanga te whakarerekē nui i te rere o te hau me te tohatoha wera, ka hua ake he tipu tioata kore-ōrite i runga i te mata o te wafer. Ko te parakore tētahi atu mea nui. Ko ngā tukanga SiC teitei e hiahia ana ki te iti rawa o te ihirangi whakarewa me te iti rawa o te taumata pungarehu i roto i ngā wāhanga e hangai ana ki te karāpeti. I te wā e whakahaerehia ana, ka mimiti haere ngā konganuku iti i roto i ngā wāhanga, ka horapa ngā poke ki roto i te rūma, ka hua ake he poke matūriki, he hapa tioata ā-rohe rānei. I roto i ētahi whare hanga, kua kitea te hapa tāpae matapōkere ki tētahi puranga kotahi o te ārai poke. He whakaritenga nui te hanganga mata. Mā te mata maeneene, ōrite hoki ka āwhina i te whakaiti i te maturuturunga o ngā matūriki i te wā o te huringa whakamahana/whakamatao. Ka pakaru tonu te mata kāore i te ōrite, arā, ngā pūwero i roto i te hanganga mata, i te wā e whakamahia ana, ā, ka puta he puna matūriki pumau ki roto i te rūma. Ko te kounga o te paninga tētahi atu whakaritenga nui. He maha ngā whakapūmau kounga teitei e whakamahi ana i te paninga SiC hei paparanga tiaki. Me piri pai te paninga ki te rauemi turanga, ā, me tu atu ki te mahi roa. Mā te hononga ngoikore me te tango-whakakikorua ka whakaatu tika i te karāpeti turanga ki te taiao tauhohenga kino. He maha ngā wā ka kitea tēnei i roto i ngā tono tūturu: hei tauira, ka kite te papanga wafer e whakahaerehia ana mō te puranga whakaputa roa i te tere o te hapa e piki haere tonu ana i muri i ngā rau huringa. Mā te tirotiro i te whakapūmau ka kitea he iti te pakaru o te paninga me te horo o te taha. Mā te whakarerekē, te whakakapi rānei i te wāhanga ka whakahokia te tere hapa ki tētahi taumata e whakaaetia ana. Ko te whiriwhiri i ngā rauemi tika ehara i te mea ko te mahi tuatahi o ngā wāhanga anake, engari ko te pumau o te rauemi i roto i ngā huringa maha.

Ngā Pānga o te Hanganga Witi ki te Pūmautanga Wera i roto i ngā Pūnaha AIXTRON G10

Ko te hanganga o te kōpura o ngā wāhanga karāpeti i roto i te SiC pāmahana-tiketike Te tipu o te epitaxy He nui te pānga o te pūnaha, pērā i te AIXTRON G10, ki te pumau o te wera. E pā ana tēnei ki ngā huringa āhua, te pupuri āhua, me te urupare ki te huringa wera. Ehara te graphite i te totoka monolithic. He maha ngā tioata, ngā kōhatu rānei kei roto. Tērā pea he rerekē ngā aronga o ngā tioata takitahi. Ina kore e taea te whakahaere i te rahi o te kōhatu i roto i te wāhanga graphite, ka puta he tohatoha wera kāore i te ōrite. Ka wera, ka whakamatao hoki ngā wāhi o te wāhanga i ngā tere rerekē. Ka hangaia he ahotea ā-roto i runga i te taumata moroiti. Mā te haere o te wā, ka puta he piko, he hē rānei i roto i ngā wāhanga pērā i te susceptor, i te kawe wafer rānei, mā tēnei ahotea ā-roto. He ngāwari te tautuhi i tēnei tukanga i te wā whakaputa. I te nuinga o te wā ka puta mai i te wā e mahi ana te raina wafer i ngā pāmahana teitei. Ka tīmata te kounga o te wafer ki te neke haere i muri i ngā rau huringa wera. Ka piki ake ngā rerekētanga o te matotoru, ā, ka tīmata te puta mai o ngā hapa taha i ngā wā katoa. Kia tirohia ēnei wāhanga, he tohu piko, he ngenge rauemi rānei. Ko ngā hanganga kōhatu pai me te tohatoha tioata whakahaere ka nui ake te pumau o te wera i ngā kōhatu matotoru, i ngā hanganga matapōkere rānei. Ka hua ake he whakawhiti wera ōrite me te whakaiti i ngā pūwāhi ahotea ā-rohe. Ki te hanganga tika o te kōhao, ka ātete ngā wāhanga ki te piko ahakoa ngā rau huringa wera. Ko ngā hanganga taratara, ko ngā hanganga kōhao kāore i te tohatohahia, ka hua ake he ngoikore i roto i te wāhanga, ka taea ai te pakaru moroiti me te tukunga o ngā matūriki ki roto i te rūma. Ko tētahi atu take nui hei whakaaro ko te ātete ki te ru wera. He wāhi kei reira te wāhanga ka pāngia e te huringa pāmahana nui pēnei i te utaina ki roto i te tauhohenga, i te wā rānei e tangohia ana. Mena he ngoikore ngā rohe i waenga i ngā kōhao, ka puta pea ngā pakaru moroiti i te taha o ngā rārangi kōhao. Ahakoa kāore tēnei e hua ake ai te rahunga o te wāhanga, ka taea ai ēnei ngoikoretanga te puta i roto i te rauemi, ka arahi ki ngā take pono ā muri ake nei. Ko te nuinga o ngā kaihanga ka whai i te roanga o te wā o te wāhanga mā ngā hāora e whakamahia ana, me te maha o ngā huringa wera me te maimoatanga wera katoa. Ko ngā wāhanga he hanganga kōhao kua hangaia pai, he roa ake te ora, he rite tonu ngā hua i roto i te wā.

Te Whakaiti i te Parahanga Whakarewa i roto i ngā Wāhanga Graphite Parakore-Teitei

Ko tētahi o ngā raruraru "kāore e kitea" engari he mea nui i roto i tētahi wāhanga karāpeti, tae atu ki te tukanga epitaxy SiC, ko te poke o te konganuku. Ahakoa ngā tohu iti o ngā konganuku i roto i tētahi wāhanga karāpeti ka taea te uru ki roto i te tukanga ka waiho hei pūtake o ngā hapa uaua ki te whai i roto i tētahi tauhohenga epitaxy SiC pērā i te AIXTRON G10. Ko ēnei konganuku i te nuinga o te wā ka ahu mai i ngā rauemi mata, i ngā mahi tukatuka rerekē rānei e uru ana ki te hanga o te wāhanga karāpeti. He mea noa ngā huānga pērā i te Rino, te Nikara, te Konupūmā me te Konutai, ā, ka mau tonu ki roto i te nuinga o te karāpeti i te pāmahana rūma, heoi, i te pāmahana tukanga teitei e whakamahia ana i roto i te epitaxy SiC, ka taea e ēnei huānga te neke. Ka taea te tango i ēnei konganuku tohu iti i te mutunga, te heke rānei ki runga i te mata i te wā o ngā huringa whakamahana/whakamatao i roto i te rohe wera, arā, te kaitautoko, te kaikawe wafer tonu. Ko tētahi take noa ko tēnei: ​​ka tīmata tētahi kamupene hanga i tētahi puranga whakaputa mā te whakamahi i ngā wāhanga karāpeti hou. He pai ngā wafer tuatahi, ā, kāore he hapa, engari i muri i tētahi wā, ka tīmata te puta mai o ngā hapa iti. He poka iti noa iho, he hapa puranga matapōkere, he huihuinga matūriki kāore e taea te whakamārama. He ngāwari te whakapae hē mō te rere hau hē, te poke rānei i te wā e horoi ana i te rūma. Engari he maha ngā wā ka hoki te tātari taipitopito ki te tukunga puhoi o ngā konganuku iti mai i ngā wāhanga karāpeti. Ko te whakahaere i te parakore o te karāpeti tētahi o ngā kī. Mō ngā wāhanga nui, ko te karāpeti kua purea i te pāmahana teitei me te iti o te pungarehu te mea e pai ake ana. Mā tēnei mahi purenga ka tangohia te nuinga o ngā toenga konganuku. Ka taea e taua karāpeti te pupuri i ngā huānga kia mau mō te wā roa ahakoa i raro i ngā huringa whakamahana/whakamatao. He mea tino nui hoki te tirotiro i ngā wāhanga karāpeti i roto i ētahi whare hanga. Mā te whakamātautau i ngā puranga karāpeti me ngā tikanga pēnei i te ICP-OES, i te XRF rānei ka ārai i te whakamahi i ngā wāhanga poke. Tērā pea ka ārai i te whakaranu i ngā wāhanga mai i ngā pūtake rerekē i roto i te rere tukanga kotahi. Ka āwhina hoki ngā paninga pēnei i te SiC, i te TaC rānei ki te whakaoti i te raruraru mā te mahi hei ārai i waenga i te wāhanga karāpeti me te taiao tukanga. Mena ka pai te whakatakotoranga o te paninga me te here ki te papa karāpeti kei raro, ka whakaitihia te taunekeneke o te wāhanga karāpeti ki te taiao tukanga. Ko te mea whakamutunga engari ehara i te mea iti ko te whakahaere me te rokiroki o ngā wāhanga karāpeti. Ka taea te poke i ngā wāhanga karāpeti i te wā e whakahaeretia ana me ngā karapu paru, ngā taputapu, mā te rongoa rānei ki runga i tētahi whata poke. Kātahi ka taea e tēnei poke o te mata te uru ki roto i te oumu i te wā o te huringa whakamahana. Hei whakaiti i te poke o ngā wāhanga karāpeti, he maha ngā mahi iti e mahia ana. Me whai rauemi parakore teitei me te whakahaere pai me te whakahaere tukanga pakari.

He aha a Veeco EPIK Systems e hiahia ai ki ngā rauemi karāpiti tino iti te porosity?

Ko ngā wāhanga karāpiti i roto i te tūāpapa Veeco EPIK Systems e pāngia ana e tētahi o ngā āhuatanga tukanga tino uaua i roto i te hanga haurua-ira. Ko ngā āhuatanga o te pāmahana teitei, te matū hau kaha me ngā huringa tukanga roa ka pāngia e ēnei wāhanga. Nō reira, he mea nui te karāpiti tino iti te porosity hei pupuri i te pono me te ma o te epitaxy SiC. Ko te porosity e pā ana ki ngā pore iti, o roto kei roto i te tinana karāpiti tonu. Ahakoa he mata maeneene rawa, ka taea e ngā pore o roto te hopu i ngā hau tukanga, ngā toenga me te matū horoi. Ko te porosity teitei te tikanga he nui ake te rōrahi o roto mō te hopu, i muri i te pānga ki te pāmahana teitei, ka taea te tango āta i te rauemi. Kāore tēnei tangohanga hau i te rārangi tonu, ā, ka arahi pea ki ngā pahūtanga, ka uaua te whakahaere i te tukanga. I roto i te epitaxy SiC, he tino kino tēnei. Ina tukuna ngā hau mai i te tinana karāpiti, ka taea te whakauru ki roto i te rere hau i roto i te rūma epitaxy, ka whai wāhi ki ngā matūriki kāore e hiahiatia. Ka kitea e ngā matūriki tō rātou ara ki runga i te mata o te papa, ka pā ki te tipu o te tioata, ā, ka arahi pea ki ngā hapa ohorere pērā i ngā rua matapōkere, te pakaru o te mata, ngā rerekētanga ā-rohe rānei o te matotoru o te papa. Ko tētahi āhuatanga noa e tūtakihia ana ko ngā arawhata whakaputa kei reira he wāhanga karāpeti hou mō te pūnaha EPIK e whiwhi ana i tētahi papanga ma. Tērā pea ka whakaaetia ngā hua tuatahi, heoi, i te mea ka hoki anō ngā huringa wera, ka piki haere pea ngā reiti hapa, ā, mā te tirotiro i te tereina tukanga tae atu ki ngā raina hau, ngā takirere me ngā wāhanga tukanga horoi, kāore pea e kitea he mea e kitea ana. He maha ngā wā ka kitea ko te karāpeti iti-porosity te take i roto i te rohe pāmahana teitei. Mā te whiriwhiri i te karāpeti tino iti-porosity ka whakaiti i tēnei mōrearea mā te whakawhāiti i ngā rōrahi o roto ka taea te huna i ngā momo kua mau, ka whakaiti i te tūponotanga o ngā tukunga hau ohorere ina werahia. E pā ana hoki ki te pai ake o te hanganga miihini. Ko te hanganga matotoru o te karāpeti tino iti-porosity ka nui ake te ātete ki te pakaru i te mea ka haere tonu te karāpeti ki te huringa wera. Hei tāpiri, ka whakatairangahia e ngā mata iti-porosity te pai ake o te kounga paninga. Ina pania te SiC me ētahi atu rauemi ātete ki ēnei mata karāpeti, ka piri pai ki tētahi mata iti ake te porosity. Tērā pea nā te piriponotanga o te hononga i waenga i te rauemi kua pania me te karāpeti tēnei, ka whakarei ake i te pakari me te roa o te wā o ngā paninga me tōna kaha ki te tihore, ki te pakarukaru rānei. Hei whakamutunga, ko te kōwhiringa o te karāpeti tino iti te porosity i roto i te horopaki hanga o ia rā, ahakoa he āhuatanga rauemi, ka whakarato i te painga tika ki te whakatutuki i te wafer pumau, ma, me te matapae ka puta i roto i ngā tukanga epitaxy SiC teitei.