Kaainga> rārangi whakaaturanga
He taputapu nui ngā mīhini whakairo i roto i te hanga taputapu pēnei i te rorohiko, te waea me ētahi atu hikohiko. Ka whakamahia e ngā mīhini tēnei mā te whakamahi i ngā papa ritenga hei whakairo i ngā hoahoa iti ki runga i ngā papa silicon e whakamahia ana hei hanga maramara hiko. I roto i te tuhinga e whai ake nei, ka ako pea tātou me pēhea te āwhina a ngā papa mīhini whakairo i te pai ake o te mahi a ā tātou taputapu hiko.
Semixlab te ātete whakaahua lithography He tino rerekē ngā mīhini i tō te wā i hangaia ai. He ngāwari noa iho ngā taputapu i whakamahia e rātou, ā, he māmā noa iho ngā āhua i taea te hanga. He roa te wā e mahi kaha ana ngā miihini me ngā kaipūtaiao ki te hanga kia tere ake, kia kaha ake, kia tika ake hoki.
Ko te whakaurunga mai o ngā mīhini stepper tētahi whakapainga nui. Mā ēnei taputapu ka whakamārama i te wafer silicon mā roto i ngā karāhe motuhake hei hanga i ngā hoahoa tino ātaahua. Nā tēnei kua taea e ngā kaihanga te hanga maramara hiko kaha ake, iti ake hoki.
He kamupene a Semixlab e tohunga ana ki ngā mīhini whakairo matihiko pakari, whai hua hoki. Ka taea e ā mātou mīhini te hanga hoahoa tere ake, me te iti ake o ngā hapa nā te mea he pūmanawa atamai kei roto. Mā tēnei ka āwhina i ngā kaihanga kia kore e moumou kaha ki te hanga maramara hiko iti iho i te kounga.

He kaitono whai hua ko te Semixlab ultraviolet tino kaha (EUV). whakaahua ātete whakaahuaKa whakamahia e tēnei he poto rawa ngā roa o te mārama hei hanga i ngā hoahoa iti ake, ā, he taipitopito ake hoki i runga i ngā papa silicon. Kei te kaha mātou ki te whakauru i te EUV ki roto i ā mātou mīhini. Mā tēnei ka taea e ngā kaihanga te hanga maramara hiko kaha ake.

He mea nui te tika me te pūmau i te hanga maramara hiko. Ahakoa he iti noa ngā hapa, ka kore e pai te mahi a te maramara. Koia te take e whai tonu ana a Semixlab ki te rapu huarahi hei whakapai ake i te tika o tā mātou mīhini tuhi whakaahua. Mā te āwhina o ngā pūoko matatau, ka taea e ā mātou mīhini te whakaputa hoahoa me ngā taipitopito whakamiharo, tae noa ki ngā inenga iti e mōhiotia ana ko ngā nanometer.

I te haere tonu o te whanaketanga o te hangarau, ka piki haere tonu te hiahia mō ngā maramara hiko iti ake, kaha ake. Koia te take e rapu tonu ana a Semixlab i ngā huarahi hou hei āwhina i te hanga i tā mātou mahi whakairo. mīhini mocvd he pai ake anō. Ahakoa he rauemi hou, he matauranga horihori rānei, e whakapau kaha ana mātou ki te whakapai ake i te mahi whakairo. Mā ngā taputapu hangarau teitei me te whakapau kaha ki te kounga, kei te ārahi a Semixlab i te heke mai o ngā mīhini whakairo.